130 nanometer

Semiconductor manufacturing processes
10 µm — 1971 3 µm — 1975 1.5 µm — 1982 1 µm — 1985 800 nm (.80 µm) — 1989 600 nm (.60 µm) — 1994 350 nm (.35 µm) — 1995 250 nm (.25 µm) — 1998 180 nm (.18 µm) — 1999 130 nm (.13 µm) — 2000 90 nm — 2002 65 nm — 2006 45 nm — 2008 32 nm — 2010 22 nm — 2011 16 nm — approx. 2013 11 nm — approx. 2015 6 nm — approx. 2020 4 nm — approx. 2022
Half-nodes

The 130 nm process refers to the level of semiconductor process technology that was reached in the 2000–2001 timeframe, by most leading semiconductor companies, like Intel, Texas Instruments, IBM, and TSMC.

The origin of the 130 nm value is historical, as it reflects a trend of 70% scaling every 2–3 years. The naming is formally determined by the International Technology Roadmap for Semiconductors (ITRS).

Some of the first CPUs manufactured with this process include Intel Tualatin family of Pentium III processors.

Processors using 130 nm manufacturing technology

• Motorola PowerPC 7447 and 7457 2002
• IBM PowerPC G5 970 - October 2002 - June 2003
• Intel Pentium III Tualatin and Coppermine - 2001-04
• Intel Celeron Tualatin-256 - 2001-10-02
• Intel Pentium M Banias - 2003-03-12
• Intel Pentium 4 Northwood- 2002-01-07
• Intel Celeron Northwood-128 - 2002-09-18
• Intel Xeon Prestonia and Gallatin - 2002-02-25
• VIA C3 - 2001
• AMD Athlon XP Thoroughbred, Thorton, and Barton
• AMD Athlon MP Thoroughbred - 2002-08-27
• AMD Athlon XP-M Thoroughbred, Barton, and Dublin
• AMD Duron Applebred - 2003-08-21
• AMD K7 Sempron Thoroughbred-B, Thorton, and Barton - 2004-07-28
• AMD K8 Sempron Paris - 2004-07-28
• AMD Athlon 64 Clawhammer and Newcastle - 2003-09-23
• AMD Opteron Sledgehammer - 2003-06-30
• Elbrus E2K 1891ВМ4Я (1891VM4YA) - 2008-04-27 [1]
• MCST R-500S 1891BM3 - 2008-07-27 [2]
• Vortex 86SX - [3]

Preceded by 180 nm

CMOS manufacturing processes

Succeeded by 90 nm