- See Carbonaceous film for the paleontology usage.
Carbon films are thin film coatings which consist predominantly of the chemical element carbon. They include plasma polymer films, amorphous carbon films (diamond-like carbon, DLC), CVD diamond films as well as graphite films.
Carbon films are produced by deposition using gas-phase deposition processes in most cases taking place in a vacuum: chemical vapor deposition, CVD or physical vapor deposition, PVD. They are deposited in the form of thin films with film thicknesses of just a few micrometres.
- Guideline 2840 : 2005-11 Carbon films - Basic knowledge, coating types and properties, Ed. by The Association of German Engineers VDI (dead link)]