File:EUV angles of incidence.png
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Summary
| Description |
English: For different pattern pitches, the angles of incidence for the customized EUV illumination of a 4x magnified pattern mask are plotted. The angle of incidence is defined using the general grating formalism as shown, for example, in http://epswww.unm.edu/xrd/xrdclass/05-Diffraction-Basics.pdf. The 6 degree central ray defines the plane of incidence. |
| Date | |
| Source | Excel |
| Author | Guiding light |
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2014-03-30 04:30 | 543×293× (17268 bytes) | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 10:09, 28 February 2016 | | 543 × 293 (17 KB) | FastilyClone | Transferred from enwp |
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