File:Wafertraksystem.jpg

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Summary

An aligner is a major piece of equipment used in semiconductor device fabrication. Trending from upper left to lower right is the wafer-track system of a photolithographic cell that uses the "i-line" from a mercury arc lamp (wavelength 365 nm) to expose photoresist deposited on silicon wafers. Wafers are robotically loaded from a carrier at the left hand of the system and progressively are coated with photoresist, exposed to ultraviolet light, and "developed". The development step involves using a solvent to remove either the exposed (positive photoresist) or unexposed (negative photoresist) portions of the film. In the foreground is a black plastic box containing silicon wafers with a diameter of 6" (150 mm).

Photo taken at HP Labs by Alison Chaiken using a Nikon 995 camera. Note that the light in the room really is yellow!

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current02:11, 3 February 2006Thumbnail for version as of 02:11, 3 February 20062,048 × 1,536 (577 KB)ChaikenAn '''aligner''' is a major piece of equipment used in semiconductor device fabrication.Trending from upper left to lower right is the wafer-track system of a photolithographic aligner that us
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