HARMST is an acronym for High Aspect Ratio Microstructure Technology that describes fabrication technologies, used to create high-aspect-ratio microstructures with heights between tens of micrometers up to a centimeter and aspect ratios greater than 10:1. Examples include the LIGA fabrication process, advanced silicon etch, and deep reactive ion etching.
- Advanced Silicon Etch
- Deep Reactive Ion Etching
- Micromechanical Systems — High Aspect Ratio (HAR) Micromachining
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