ISO 14644-6

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ISO 14644-6: Vocabulary as an important document for any contamination control professional. This document describes all the terms and definitions in all the ISO 14644 and ISO 14698. In March 2008 this ISO Standard recently became an American National Standard.[1]

See also[edit]

  • ISO 14644 - standard for Airborne Particulate Cleanliness Classes in Cleanrooms and Clean Zones


  1. ^ "ISO 14644-6 Scope". IEST. 2007-12-03. Retrieved 2008-01-17. 

Related links[edit]