Journal of Vacuum Science and Technology

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The name Journal of Vacuum Science and Technology (JVST) combines two scientific journals, JVST A and JVST B, published by the American Vacuum Society since 1964.

History[edit]

  • 1964–1982 Journal of Vacuum Science and Technology ISSN 0022-5355
  • 1983–present Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
  • 1983–1990 Journal of Vacuum Science & Technology B: Microelectronics Processing and Phenomena
  • 1991–present Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures

JVST A[edit]

Journal of Vacuum Science and Technology A specializes in applied surface science, electronic materials and processing, fusion technology, plasma technology, surface science, thin films, vacuum metallurgy, and vacuum technology. According to the Journal Citation Reports, the journal has a 2012 impact factor of 1.432.

Editor: G. Lucovsky, Department of Physics, North Carolina State University.

Content of the Journal: http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTAD6

JVST B[edit]

Journal of Vacuum Science and Technology B specializes in vacuum processing and plasma processing of various materials, the structural characterization, microlithography, and the physics and chemistry of submicrometer and nanometer structures and devices. According to the Journal Citation Reports, the journal has a 2012 impact factor of 1.267.

Editor: Eray Aydil, Department of Chemical Engineering and Materials Science, University of Minnesota.

Content of the Journal: http://scitation.aip.org/dbt/dbt.jsp?KEY=JVTBD9

External links[edit]