On the asteroid Eros, the NEAR Shoemaker probe touched down on the surface on 12 February 2001, although it had not been specifically designed for this purpose.
On Titan, a moon of Saturn, the Huygens probe from the Cassini-Huygens mission landed successfully on 14 January 2005. NASA currently has plans to steer the main spacecraft into Saturn's atmosphere after its mission ends to prevent the contamination of Titan's surface by any terrestrial microbes.
On the asteroid 25143 Itokawa, a target marker from the Hayabusa probe, which has a list of 880,000 names etched on it, was released to the surface on 19 November 2005.
The Galileo spacecraft released a 339-kg probe into Jupiter's atmosphere in 1995. During the parachute-assisted descent, contact with the probe was lost when it overheated. The probe melted in the following hours. The main spacecraft stayed in orbit around Jupiter until 2003 when it was deliberately sent into Jupiter's atmosphere by ground controllers as a measure to prevent forward-contamination of the moon Europa, which may have a subterranean ocean, by any terrestrial microbes and radioactive waste. Lacking its probe's heat shield, it disintegrated upon entry in Jupiter's atmosphere in a matter of seconds.