Oxalyl fluoride

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Oxalyl fluoride
Structural formula of oxalyl fluoride Ball-and-stick model of oxalyl fluoride
CAS number 359-40-0 YesY
PubChem 9668
ChemSpider 9287
EC number 206-630-4
Jmol-3D images Image 1
Molecular formula C2F2O2
Molar mass 94.017 g/mol
Except where noted otherwise, data are given for materials in their standard state (at 25 °C (77 °F), 100 kPa)
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Infobox references

Oxalyl fluoride is a fluorinated derivative of oxalic acid. It is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.[1][2]

See also[edit]


  1. ^ Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.
  2. ^ Simon Karecki, Ritwik Chatterjee, Laura Pruette, Rafael Reif, Terry Sparks, Laurie Beu, Victor Vartanian, and Konstantin Novoselovc (2001). "Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool". J. Electrochem. Soc. 148 (3): G141–G149. doi:10.1149/1.1348263.