Atomic-terrace low-angle shadowing
Atomic Terrace Low Angle Shadowing (ATLAS) is a technique for the fabrication of material independent planar arrays of nanowires. The technique involves the low angle incidence of flux material on vicinal substrates. Vicinal substrates are composed of atomic terraces separated by atomic steps. The ATLAS technique allows for the fabrication of well defined planar arrays of plasmonic nanostructures, of dimensions unachievable by lithography.
- Cuccureddu, F.; Usov, V.; Murphy, S.; Coileain, C.O.; Shvets, I. (20 May 2008). "Planar nanowire arrays formed by atomic-terrace low-angle shadowing". Review of Scientific Instruments (American Institute of Physics) 79 (5). doi:10.1063/1.2929835. ISSN 0034-6748.