File:Complementary polarity line-cutting.png
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Summary
| Description |
English: Top: Four cut exposures for 11-18 nm half-pitch quadruple patterning. Bottom: The same cuts can be accomplished by two exposures, one cut (orange) and one block (black). Ref.: F. T. Chen et al., Proc. SPIE 8326, 83262L (2012). |
| Date |
2015-07-01 |
| Source | Excel drawing |
| Author | Guiding light |
Licensing
Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
This file is licensed under the Creative Commons Attribution-Share Alike 3.0 Unported license.
Attribution: Guiding light at en.wikipedia
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2015-07-04 02:03 | 331×749× (13291 bytes) | Guiding light | less confusing pattern drawing |
| 2015-07-03 13:05 | 331×749× (13585 bytes) | Guiding light | change to more likely pattern for higher density |
| 2015-07-03 06:18 | 243×617× (9247 bytes) | Guiding light | Larger aspect ratio |
| 2015-07-03 02:10 | 243×464× (6996 bytes) | Guiding light | |
| 2015-07-01 00:41 | 265×464× (7526 bytes) | Guiding light |
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 05:58, 13 March 2016 | | 331 × 749 (13 KB) | OgreBot | (BOT): Reverting to most recent version before archival |
| 05:58, 13 March 2016 |  | 331 × 749 (13 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-03 13:05:29 by Guiding light | |
| 05:58, 13 March 2016 |  | 243 × 617 (9 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-03 06:18:26 by Guiding light | |
| 05:58, 13 March 2016 |  | 243 × 464 (7 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-03 02:10:04 by Guiding light | |
| 05:58, 13 March 2016 |  | 265 × 464 (7 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2015-07-01 00:41:01 by Guiding light | |
| 10:16, 28 February 2016 |  | 331 × 749 (13 KB) | FastilyClone | Transferred from enwp |
File usage
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