|Preferred IUPAC name
Carbon hexafluoride, 1,1,1,2,2,2-Hexafluoroethane, Perfluoroethane, Ethforane, Halocarbon 116, PFC-116, CFC-116, R-116, Arcton 116, Halon 2600, UN 2193
3D model (JSmol)
CompTox Dashboard (EPA)
|Molar mass||138.01 g.mol−1|
|Appearance||Colorless odorless gas|
|Density||5.734 kg.m−3 at 24 °C|
|Melting point||−100.6 °C (−149.1 °F; 172.6 K)|
|Boiling point||−78.2 °C (−108.8 °F; 195.0 K)|
|Safety data sheet||See: data page|
|NFPA 704 (fire diamond)|
|Supplementary data page|
|Refractive index (n),|
Dielectric constant (εr), etc.
|UV, IR, NMR, MS|
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
|what is ?)(|
Hexafluoroethane is the perfluorocarbon counterpart to the hydrocarbon ethane. It is a non-flammable gas negligibly soluble in water and slightly soluble in alcohol. It is an extremely potent and long-lived greenhouse gas.
Hexafluoroethane's solid phase has two polymorphs. In the scientific literature, different phase transition temperatures have been stated. The latest works assign it at 103 K (−170 °C). Below 103 K it has a slightly disordered structure, and over the transition point, it has a body centered cubic structure. The critical point is at 19.89 °C (293.04 K) and 30.39 bar.
Table of densities:
|State, temperature||Density (kg.m−3)|
|liquid, −78.2 °C||16.08|
|gas, −78.2 °C||8.86|
|gas, 15 °C||5.84|
|gas, 20.1 °C||5.716|
|gas, 24 °C||5.734|
Vapor density is 4.823 (air = 1), specific gravity at 21 °C is 4.773 (air = 1) and specific volume at 21 °C is 0.1748 m3/kg.
Hexafluoroethane is used as a versatile etchant in semiconductor manufacturing. It can be used for selective etching of metal silicides and oxides versus their metal substrates and also for etching of silicon dioxide over silicon. The primary aluminium and the semiconductor manufacturing industries are the major emitters of hexafluoroethane using the Hall-Héroult process.
Due to the high energy of C-F bonds, hexafluorethane is nearly inert and thus acts as an extremely stable greenhouse gas, with an atmospheric lifetime of 10,000 years (other sources: 500 years). It has a global warming potential (GWP) of 9200 and an ozone depletion potential (ODP) of 0. Hexafluoroethane is included in the IPCC list of greenhouse gases.
Hexafluorethane did not exist in significant amounts in the environment prior to industrial-scale manufacturing. Atmospheric concentration of hexafluoroethane reached 3 pptv at the start of the 21st century. Its absorption bands in the infrared part of the spectrum cause a radiative forcing of about 0.001 W/m2.
- Fluorocarbon, Perfluorocarbon
- Zeng, S.X.; Simmons, R.O.; Timms, D.N.; Evans, A.C. (1999). "Dynamics and structure of solid hexafluoroethane". Journal of Chemical Physics. 110 (3): 1650–61. Bibcode:1999JChPh.110.1650Z. doi:10.1063/1.477806.
- Helmut Schan: Handbuch der reinsten Gase. Springer, 2005, ISBN 978-3-540-23215-5, S. 307.
- "Perfluoroethane CASRN: 76-16-4". TOXNET Toxicology Data Network. National Library of Medicine. 2016-10-25.
- "Climate Change 2001: The Scientific Basis". Archived from the original on 2007-06-15. Retrieved 2007-06-02.
- Purification process of hexafluoroethane
- Protocol for measurement of tetrafluoromethane and hexafluoroethane from primary aluminium production
- De Maré, G.R.; Panchenko, Yu. N. (March 2006). "Ab initio vibrational analysis of hexafluoroethane C2F6". Journal of Structural Chemistry. 47 (2): 232–240. doi:10.1007/s10947-006-0291-y. S2CID 96363970.
- Protocol for Measurement of Tetrafluoromethane (CF
4) and Hexafluoroethane (C
6) Emissions from Primary Aluminum Production
- Thermochemistry data table at chemnet.ru