3D model (JSmol)
|Molar mass||387.93 g·mol−1|
|Density||0.984 g/mL, liquid|
|Boiling point||223 °C (433 °F; 496 K) at 10 Torr|
|Solubility||soluble in ether, THF, THP, hydrocarbons, tetrachloroethylene|
|Main hazards||flammable, corrosive|
|S-phrases (outdated)||S26 S27 S36 S37 S39|
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
|what is ?)(|
Octadecyltrichlorosilane (ODTS, or n-octadecyltrichlorosilane) is an organometallic chemical. It is used in semiconductor industry to form self-assembled monolayer thin films on silicon dioxide substrates. Its structural chemical formula is CH3(CH2)17SiCl3. It is flammable, reacts with water, and is also sensitive to air. It is corrosive and can severely damage mucous membranes. Its EINECS number is 203-930-7.
Octadecyltrichlorosilane is an amphiphilic molecule consisting of a long-chain alkyl group (C18H37–) and a polar head group (SiCl3–), which forms Self assembled monolayers (SAMs) on various oxidic substrates.
ODTS finds its use in molecular electronics, as thin insulating gates in Metal-Insulator-Semiconductor Field-Effect Transistors.
Dodecyltrichlorosilane, an ODTS analog with shorter alkyl chain, is used for the same purpose as well.
- Beauty is Just One Layer: Introduction to Self Assembled Monolayers Archived 2004-05-05 at the Wayback Machine.
- http://www.ruhr-uni-bochum.de/pc1/deutsch/pub/131.htm[dead link]
- Sony Develops TFT Substrate Entirely Formed by Organic Materials - Tech-On!