Propylene glycol methyl ether acetate
PGMEA; 1-Methoxy-2-propanol acetate
3D model (JSmol)
CompTox Dashboard (EPA)
|Molar mass||132.159 g·mol−1|
|H226, H360, H402|
|Flash point||43 °C (109 °F; 316 K)|
|333 °C (631 °F; 606 K)|
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA and by Shell Chemical under the name methyl proxitol acetate.
In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers. The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms, due to its evaporation into ambient air.
- "1-Methoxy-2-propyl acetate_msds".
- GOV, NOAA Office of Response and Restoration, US. "PROPYLENE GLYCOL METHYL ETHER ACETATE - CAMEO Chemicals - NOAA".
- "Archived copy" (PDF). Archived from the original (PDF) on 2014-08-08. Retrieved 2014-08-01.CS1 maint: Archived copy as title (link)
- "Methyl PROXITOL".
- "HMDS primer (hexamethyldisilazane), DEATS and PGMEA".