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Stereo wireframe model of tetrakis(dimethylamino)titanium(IV)
Preferred IUPAC name
Systematic IUPAC name
Other names
Titanium(IV) dimethylamide
3275-24-9 N
Abbreviations TDMAT
ChemSpider 13870283 YesY
ECHA InfoCard 100.019.914
EC Number 221-904-3
Jmol 3D model Interactive image
PubChem 123185
UN number 2924


Molar mass 224.19 g/mol
Appearance yellow liquid
Density 0.947 g/cm³
Boiling point 50 °C (122 °F; 323 K) at 0.05 mmHg
reacts with water
R-phrases 11-14-34
S-phrases 16 - 26 - 36/37/39 - 43 - 45
NFPA 704
Flammability code 3: Liquids and solids that can be ignited under almost all ambient temperature conditions. Flash point between 23 and 38 °C (73 and 100 °F). E.g., gasoline) Health code 3: Short exposure could cause serious temporary or residual injury. E.g., chlorine gas Reactivity code 2: Undergoes violent chemical change at elevated temperatures and pressures, reacts violently with water, or may form explosive mixtures with water. E.g., phosphorus Special hazards (white): no codeNFPA 704 four-colored diamond
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Infobox references

Tetrakis(dimethylamino)titanium (TDMAT) is a chemical compound. The compound is generally classified as a metalorganic species, meaning that its properties are strongly influenced by the organic ligands but the compound lacks metal-carbon bonds. It is used in chemical vapor deposition to prepare titanium nitride (TiN) surfaces and in atomic layer deposition as a titanium dioxide precursor. The prefix "tetrakis" refers the presence of four of the same ligand, in this case dimethylamides.

Preparation and properties[edit]

Tetrakis(dimethylamino)titanium is a conventional Ti(IV) compound in the sense that it is tetrahedral and diamagnetic. Unlike the many alkoxides, the diorganoamides of titanium are monomeric and thus at least somewhat volatile. It is prepared from titanium tetrachloride (which is also tetrahedral, diamagnetic, and volatile) by treatment with lithium dimethylamide:[1]

TiCl4 + 4 LiNMe2 → Ti(NMe2)4 + 4 LiCl

Like many amido complexes, TDMAT is quite sensitive toward water, and its handling requires air-free techniques. The ultimate products of its hydrolysis is titanium dioxide and dimethylamine:

Ti(NMe2)4 + 2 H2O → TiO2 + 4 HNMe2

In a related reaction, the compound undergoes exchange with other amines, evolving dimethylamine.

See also[edit]


  1. ^ D. C. Bradley and I. M. Thomas, "Part I. Metallo-organic Compounds containing Metal-Nitrogen bonds. Some Dialkylamino-derivatives of Titanium and Zirconium" J. Chem. Soc. 1960, 3857-3861. doi:10.1039/JR9600003857.