File:2-color split.png
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Summary
| Description |
For ~40 nm pitch, two masks (represented by different colors) may be used to cut the spacer-defined lines (top) as well as the patterning the corresponding via locations (bottom). References:
|
| Date | |
| Source | Excel drawing |
| Author | Guiding light |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Attribution: Guiding light at English Wikipedia
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2018-03-20 14:34:41 | 263 × 636 | Guiding light | |
| 2018-03-17 14:57:57 | 262 × 697 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 04:13, 5 April 2018 | | 263 × 636 (10 KB) | OgreBot | (BOT): Reverting to most recent version before archival |
| 04:13, 5 April 2018 |  | 262 × 697 (11 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-03-17 14:57:57 by Guiding light | |
| 14:34, 4 April 2018 |  | 263 × 636 (10 KB) | Iazyges | Transferred from en.wikipedia (MTC!) (1.1.0) |
File usage
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