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Summary

Description
English: Schematic diagram of a plasma CVD (Chemical Vapor Deposition) system.
日本語: プラズマCVD装置の構成図
Русский: Схема процесса плазменно-химического осаждения из газовой фазы
Date
Source Own work
Author S-kei
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20 September 2008

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Date/TimeThumbnailDimensionsUserComment
current11:01, 20 September 2008Thumbnail for version as of 11:01, 20 September 2008678 × 253 (7 KB)S-kei{{Information |Description={{en|1=Schematic diagram of a hot-wall CVD (Chemical Vapor Deposition) system.}} {{ja|1=ホットウォール型の熱CVD装置の構成図}} |Source=Own work by uploader |Author=S-kei |Date=2008 Sep 20 |Permissio
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