Alcatel Micro Machining Systems
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Alcatel Micro Machining Systems is a French manufacturer of Deep Reactive Ion Etching Systems. The company's headquarters are in Annecy, France. Alcatel Micro Machining Systems is also called AMMS.
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[edit] History
2011 SPTS acquired Tegal DRIE assetts (formerly AMMS): The deal included the transfer to SPTS of the capital stock and operations of Tegal France SAS, a wholly owned Tegal subsidiary formed following the acquisition in September 2008 by Tegal of the DRIE assets of Alcatel Micro Machining Systems.
Alcatel Vacuum Technology, based in Annecy (France) has been involved in plasma processing for more than 25 years.
Its first equipment based on an Alcatel patented Inductive Coupled Plasma (ICP) source, with independent source power and substrate bias control for deep etching of silicon was launched in 1993. The exponential growth potential of the MEMS (Micro Electro Mechanical Systems) industry gave birth to the Micro Machining Systems business group (MMS) in 1994.
Alcatel Micro Machining Systems (AMMS) is now a business unit within Alcatel Vacuum Technology headquartered in Annecy, France. AMMS is a world-class supplier of deep plasma etching systems to manufacturers of MEMS (Micro Electro Mechanical Systems) and devices related to microelectronics and micropackaging applications.
[edit] Products
The company previously manufactured DRIE systems with a large portfolio of processes and applications, including:
- Notching free
- Profile control
- Dry release
- Patented Sharp process: Super High Aspect Ratio
- Tapered via
- High etch rate
- V shape
- Cryo process
- Through the wafer
- High etch rate and low roughness
- High aspect ratio for 3D
- Fused Silica etching
- Low smoothness
- High aspect ratio holes
Their tools could be configured to meet the specific requirements of various manufacturing configurations, from R&D to high-volume production environments.
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