User:Reimarspohr/Temp/Ion Track Technology/Characteristics

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Task of ion track technology[edit]

Ion track technology can fill a niche where conventional microtechnology fails:

  • Mask-less structuring is possible with random pattern governed by probability.[1]
  • The technique is applicable to radiation resistant minerals, glasses and polymers.[2]
  • The resolution limit of the structuring technique is smaller than 8 nanometers.[3]
  • Thin polymer films can be structured directly without any development process.[4]
  • Structural depth can be defined either by the film thickness or by the ion range.[5][6]
  • Aspect ratios depend on material and processing and range between 1 and 104.[2]
  • For narrow tracks it is possible to shape materials at defined cutting angle.[7]
  • The angle of incidence offers two new degrees of freedom in shaping materials.[8]

Notes[edit]

  1. ^ C. Riedel, R. Spohr (1980). "Transmission Properties of Nuclear Track Filters". Journal of Membrane Science. 7: 225–234. {{cite journal}}: Cite has empty unknown parameter: |month= (help)
  2. ^ a b R.L. Fleischer, P.B. Price, R.M. Walker (1975). Nuclear tracks in solids. University of California Press. ISBN 0520026659.{{cite book}}: CS1 maint: multiple names: authors list (link)
  3. ^ W. D. Williams and N. Giordano (1984). "Fabrication of 80 Å metal wires". Review of Scientific Instruments. 55 (3): 410–412. Bibcode:1984RScI...55..410W. doi:10.1063/1.1137752.
  4. ^ Y. Eyal, K. Gassan (1999). "Observation of latent heavy-ion tracks in polyimide by means of transmission electron microscopy". Nuclear Instruments and Methods in Physics Research B. 156 (1–4): 183–190. {{cite journal}}: Cite has empty unknown parameter: |month= (help)
  5. ^ J.F. Ziegler (1980). Handbook of Stopping Cross-Sections for Energetic Ions in All Elements. Pergamon Press. ASIN 0080216072. {{cite book}}: Check |asin= value (help)
  6. ^ Stopping and Range Calculation
  7. ^ M. Lindeberg, K. Hjort (2004). "A comprehensive study of ion track enabled high aspect ratio microstructures in flexible circuit boards". Microsystem Technologies. 10: 608–621. {{cite journal}}: Cite has empty unknown parameter: |month= (help)
  8. ^ R. Spohr, G. Sharma, P. Forsberg, M. Karlsson, A. Hallén, L. Westerberg (2010). "Stroke Asymmetry of Tilted Superhydrophobic Ion Track Textures". Langmuir. 26 (9): 6790–6796. {{cite journal}}: Cite has empty unknown parameter: |month= (help)CS1 maint: multiple names: authors list (link)