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MEMS magnetic actuator
micro-relays. Senturia, Stephen D. (2001). Microsystem Design. ISBN
978
-
0
-
7923
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7246
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2
. Arnold, D. (Fall 2010 – Spring 2011). Lecture Notes on MEMS Transducers...
12 KB (1,630 words) - 01:39, 16 May 2024
