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Bis(trimethylsilyl)amine

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Bis(trimethylsilyl)amine (also known as hexamethyldisilazane, or HMDS) a chemical reagent with molecular formula (CH3)3Si-NH-Si(CH3)3 which consists of ammonia substituted with two trimethylsilyl functional groups. It is a clear, colorless liquid that will hydrolize slowly upon exposure to water.

A bis(trimethylsilyl)amide (also known as hexamethyldisilazide) results from the deprotonation of the nitrogen atom of bis(trimethylsilyl)amines and are used as non-nucleophilic bases:

Examples of these bases are:

Uses in organic chemistry

One of the uses of HMDS is as a reagent in condensation reactions of heterocyclic compounds such as in the microwave synthesis of a derivative of xanthine[1]:

HMDS application

Other uses

In photolithography, HMDS is often used in as an adhesion promoter for photoresist. Best results are obtained by applying HMDS from the gas phase on heated substrates.[2]

In electron microscopy, HMDS can be used as an alternative to critical point drying during sample preparation.[3]

See also

References

  1. ^ Microwave-assisted Ring Closure Reactions: Synthesis of 8-substituted Xanthine Derivatives and related Pyrimido- and Diazepinopurinediones Burbiel J, Hockemeyer J, Mueller C Beilstein Journal of Organic Chemistry, 2006 2:20 ( 27 October 2006 ) doi:10.1186/1860-5397-2-20
  2. ^ Cornell NanoScale Science & Technology Facility. "CNF - Photolithography Resist Processes and Capabilities". Retrieved 2008-01-29.
  3. ^ Bray DF, Bagu J, Koegler P (1993). "Comparison of hexamethyldisilazane (HMDS), Peldri II, and critical-point drying methods for scanning electron microscopy of biological specimens". Microsc. Res. Tech. 26 (6): 489–95. doi:10.1002/jemt.1070260603. PMID 8305726.{{cite journal}}: CS1 maint: multiple names: authors list (link)