File:Binary vs PSM NILS.png
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Summary
| Description | The tip-to-tip gap NILS for phase-shift masks is superior to that of binary masks (Refs.: C. S. Choi et al., Proc. SPIE 9235, 92351R (2014); www.lithoguru.com/textbook/Chapter10_Figures.ppt, p. 37.) EUV's lack of phase-shift masks handicaps the ability to print gaps between line ends. Dipole illumination is assumed here. |
| Date | |
| Source | Excel |
| Author | Guiding light |
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| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2017-02-05 07:28:46 | 481 × 289 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 04:12, 30 March 2017 | | 481 × 289 (10 KB) | FastilyClone | Transferred from en.wikipedia (MTC!) |
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