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File:EUV Throughput vs Source Power.png

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EUV_Throughput_vs_Source_Power.png (601 × 289 pixels, file size: 18 KB, MIME type: image/png)

Summary

Description
English: Shows EUV throughput for vs. IF power for different doses. Refs: V. Bakshi, 2010 EUVL workshop; O. Wood, SEMATECH Litho Forum 2010
Date

2014-12-20

(2014-12-20 (first version); 2014-12-20 (last version))
Source Excel
Author Guiding light

Licensing

Guiding light at en.wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
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attribution share alike
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Attribution: Guiding light at en.wikipedia
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Original upload log

The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2014-12-20 14:49 601×289× (18140 bytes) Guiding light
2014-12-20 14:42 601×289× (17865 bytes) Guiding light Added more doses
2014-12-20 08:02 481×288× (12914 bytes) Guiding light More data points to cover wider range of 10 mJ/cm2
2014-12-20 06:46 481×288× (12349 bytes) Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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File history

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Date/TimeThumbnailDimensionsUserComment
current06:02, 13 March 2016Thumbnail for version as of 06:02, 13 March 2016601 × 289 (18 KB)OgreBot(BOT): Reverting to most recent version before archival
06:01, 13 March 2016Thumbnail for version as of 06:01, 13 March 2016601 × 289 (17 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-12-20 14:42:01 by Guiding light
06:01, 13 March 2016Thumbnail for version as of 06:01, 13 March 2016481 × 288 (13 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-12-20 08:02:09 by Guiding light
06:01, 13 March 2016Thumbnail for version as of 06:01, 13 March 2016481 × 288 (12 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2014-12-20 06:46:09 by Guiding light
10:11, 28 February 2016Thumbnail for version as of 10:11, 28 February 2016601 × 289 (18 KB)FastilyCloneTransferred from enwp
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