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File:LELE SID cut.png

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Summary

Description
English: A 2D pattern such as a brick pattern can be formed by a LELE + SADP + cut process. Such a process has been proposed by IMEC for 7nm fins.[1] The white space directly surrounding a LE1 or LE2 feature is occupied by a spacer, while the purple gap is left over after spacer etchback, allowing additional features to be defined. The cuts themselves may need to be split into two parts, as shown here, when the pitch is further reduced.
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This diagram was created with Microsoft Excel.
Author Guiding light

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Original upload log

The original description page was here. All following user names refer to en.wikipedia.
Date/Time Dimensions User Comment
2018-10-28 12:10:14 481 × 610 Guiding light
2018-10-27 23:50:34 481 × 610 Guiding light
2018-10-27 23:35:25 481 × 610 Guiding light
2018-10-27 23:33:34 481 × 610 Guiding light
2018-10-27 15:38:32 481 × 292 Guiding light
2018-10-27 15:35:07 481 × 292 Guiding light
2018-10-27 06:28:37 481 × 292 Guiding light
2018-10-27 06:22:41 481 × 292 Guiding light correction (more like original)
2018-10-27 06:11:24 481 × 349 Guiding light correction (continued)
2018-10-27 06:06:54 481 × 349 Guiding light
2018-10-27 06:05:41 481 × 349 Guiding light
2018-10-27 06:01:03 481 × 349 Guiding light correction
2018-10-27 05:19:31 481 × 294 Guiding light
2018-10-27 04:39:13 481 × 322 Guiding light
2018-10-27 04:18:20 481 × 322 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]
  1. ↑ A. Malik et al., Proc. SPIE 9048, 90481R (2014).

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27 October 2018

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Date/TimeThumbnailDimensionsUserComment
current06:13, 4 January 2020Thumbnail for version as of 06:13, 4 January 2020479 × 610 (15 KB)Guiding lightCuts divided into two parts (marked by different colors)
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019481 × 610 (14 KB)OgreBot(BOT): Reverting to most recent version before archival
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019481 × 610 (14 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-10-27 23:50:34 by Guiding light
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019481 × 610 (14 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-10-27 23:35:25 by Guiding light
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019481 × 610 (13 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-10-27 23:33:34 by Guiding light
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019481 × 292 (7 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-10-27 15:38:32 by Guiding light
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019481 × 292 (7 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-10-27 15:35:07 by Guiding light
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019481 × 292 (7 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-10-27 06:28:37 by Guiding light
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019481 × 292 (8 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-10-27 06:22:41 by Guiding light
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019481 × 349 (8 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-10-27 06:11:24 by Guiding light
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