File:LELE cut for vias.png
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Summary
| Description |
English: LELE double patterning followed by a cut or blocking mask exposure. Ref.: B. Yu et al., J. Micro/Nanolith. MEMS MOEMS 14, 011002 (2015). |
| Date | |
| Source |
.svg){kind=small} This diagram was created with Microsoft Excel. |
| Author | Guiding light |
Licensing
Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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Original upload log
The original description page was here. All following user names refer to en.wikipedia.
| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2018-12-29 02:18:23 | 811 × 639 | Guiding light | |
| 2018-11-02 04:43:32 | 322 × 442 | Guiding light | |
| 2018-11-02 04:16:46 | 322 × 442 | Guiding light | |
| 2018-11-01 21:25:49 | 412 × 639 | Guiding light | |
| 2018-11-01 16:06:51 | 907 × 639 | Guiding light | |
| 2018-11-01 15:57:51 | 907 × 639 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 07:10, 4 January 2020 | | 841 × 610 (11 KB) | Guiding light | Different pattern decomposition |
| 21:27, 20 August 2019 |  | 811 × 639 (11 KB) | OgreBot | (BOT): Reverting to most recent version before archival | |
| 21:27, 20 August 2019 |  | 322 × 442 (4 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-11-02 04:43:32 by Guiding light | |
| 21:27, 20 August 2019 |  | 322 × 442 (4 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-11-02 04:16:46 by Guiding light | |
| 21:27, 20 August 2019 |  | 412 × 639 (6 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-11-01 16:06:51 by Guiding light | |
| 21:27, 20 August 2019 |  | 907 × 639 (15 KB) | OgreBot | (BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-11-01 15:57:51 by Guiding light | |
| 16:24, 20 August 2019 |  | 811 × 639 (11 KB) | Dave louis john | Transferred from en.wikipedia (MTC!) (1.1.0) |
File usage
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