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Summary

Description
English: LELE double patterning followed by a cut or blocking mask exposure. Ref.: B. Yu et al., J. Micro/Nanolith. MEMS MOEMS 14, 011002 (2015).
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This diagram was created with Microsoft Excel.
Author Guiding light

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Guiding light at English Wikipedia, the copyright holder of this work, hereby publishes it under the following licenses:
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Date/Time Dimensions User Comment
2018-12-29 02:18:23 811 × 639 Guiding light
2018-11-02 04:43:32 322 × 442 Guiding light
2018-11-02 04:16:46 322 × 442 Guiding light
2018-11-01 21:25:49 412 × 639 Guiding light
2018-11-01 16:06:51 907 × 639 Guiding light
2018-11-01 15:57:51 907 × 639 Guiding light Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]]

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Date/TimeThumbnailDimensionsUserComment
current07:10, 4 January 2020Thumbnail for version as of 07:10, 4 January 2020841 × 610 (11 KB)Guiding lightDifferent pattern decomposition
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019811 × 639 (11 KB)OgreBot(BOT): Reverting to most recent version before archival
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019322 × 442 (4 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-11-02 04:43:32 by Guiding light
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019322 × 442 (4 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-11-02 04:16:46 by Guiding light
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019412 × 639 (6 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-11-01 16:06:51 by Guiding light
21:27, 20 August 2019Thumbnail for version as of 21:27, 20 August 2019907 × 639 (15 KB)OgreBot(BOT): Uploading old version of file from en.wikipedia; originally uploaded on 2018-11-01 15:57:51 by Guiding light
16:24, 20 August 2019Thumbnail for version as of 16:24, 20 August 2019811 × 639 (11 KB)Dave louis johnTransferred from en.wikipedia (MTC!) (1.1.0)
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