File:NILS vs pitch for conventional EUV illumination.png
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Summary
| Description | Normalized image log-slope (NILS) vs 2D pitch assuming 0.33 NA conventional illumination. Ref.: J. van Schoot et al., Proc. SPIE 9422, 94221F (2015). |
| Date | |
| Source | Excel |
| Author | Guiding light |
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Original upload log
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| Date/Time | Dimensions | User | Comment |
|---|---|---|---|
| 2018-03-24 12:24:01 | 483 × 288 | Guiding light | Uploading a self-made file using [[Wikipedia:File_Upload_Wizard|File Upload Wizard]] |
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File history
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| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 16:01, 2 April 2020 | | 483 × 288 (7 KB) | Hippymoose17 | Transferred from en.wikipedia (MTC!) (1.1.0) |
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