Oxalyl fluoride
Appearance
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Names | |||
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IUPAC name
Oxalyl difluoride
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Other names
Oxalyl fluoride, ethanedioyl difluoride
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Identifiers | |||
3D model (JSmol)
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ECHA InfoCard | 100.006.029 | ||
EC Number |
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PubChem CID
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CompTox Dashboard (EPA)
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Properties | |||
C2F2O2 | |||
Molar mass | 94.017 g/mol | ||
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Oxalyl fluoride is a fluorinated derivative of oxalic acid. It is being investigated for use in etching as a replacement for compounds which have the liability of high global warming potential.[1][2]
See also
References
- ^ Method of etching and cleaning using fluorinated carbonyl compounds, US Patent 6635185.
- ^ Simon Karecki, Ritwik Chatterjee, Laura Pruette, Rafael Reif, Terry Sparks, Laurie Beu, Victor Vartanian, and Konstantin Novoselovc (2001). "Evaluation of Oxalyl Fluoride for a Dielectric Etch Application in an Inductively Coupled Plasma Etch Tool". J. Electrochem. Soc. 148 (3): G141–G149. doi:10.1149/1.1348263.
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