Ethylenediamine pyrocatechol
Ethylenediamine pyrocatechol (EDP), also known as ethylenediamine-pyrocatechol-water (EPW), is an anisotropic etchant solution for silicon.[1] A typical formulation consists of ethylenediamine, pyrocatechol, pyrazine and water. It is carcinogenic and very corrosive.[1] It is mainly used in research labs, and is not used in mainstream semiconductor fabrication processes.[1]
References
[edit]- ^ a b c Microfabrication:Wet-Etching, University of Washington, College of Engineering
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