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'''Propylene glycol methyl ether acetate''' ('''PGMEA''', '''1-methoxy-2-propanol acetate''') is a P-type [[glycol ether]] used in inks, coatings, and cleaners. It is sold by [[Dow Chemical]] under the name Dowanol PMA<ref>http://www.dow.com/scripts/litorder.asp?filepath=oxysolvents/pdfs/noreg/110-00588.pdf</ref> and by Shell Chemical under the name methyl proxitol acetate.<ref>http://s00.static-shell.com/content/dam/shell/static/chemicals/downloads/responsible-energy/methylproxitol-pgmemethylproxitolacetatepgmeaproductstewardships.pdf</ref><ref>http://www.shell.com/global/products-services/solutions-for-businesses/chemicals/products/solvents/chemical-solvents/glycol-ethers/methyl-proxitol.html</ref>
'''Propylene glycol methyl ether acetate''' ('''PGMEA''', '''1-methoxy-2-propanol acetate''') is a P-type [[glycol ether]] used in inks, coatings, and cleaners. It is sold by [[Dow Chemical]] under the name Dowanol PMA<ref>http://www.dow.com/scripts/litorder.asp?filepath=oxysolvents/pdfs/noreg/110-00588.pdf</ref> and by Shell Chemical under the name methyl proxitol acetate.<ref>http://s00.static-shell.com/content/dam/shell/static/chemicals/downloads/responsible-energy/methylproxitol-pgmemethylproxitolacetatepgmeaproductstewardships.pdf</ref><ref>{{cite web|url=http://www.shell.com/global/products-services/solutions-for-businesses/chemicals/products/solvents/chemical-solvents/glycol-ethers/methyl-proxitol.html|title=Methyl PROXITOL|publisher=}}</ref>


In the semiconductor industry, PGMEA is a commonly used [[solvent]], primarily for the application of surface adherents such as [[Bis(trimethylsilyl)amine]] (HMDS) on silicon wafers.<ref>https://www.microsi.com/product-category/lithography/adhesion-promoters/</ref> The compound is often the most abundant airborne, molecular [[contamination]] (AMC) in semiconductor cleanrooms,<ref>http://www.balazs.com/file/otherelement/pj/1_amc_guidelines_rev2.34642.pdf</ref> due to its evaporation into ambient air.
In the semiconductor industry, PGMEA is a commonly used [[solvent]], primarily for the application of surface adherents such as [[Bis(trimethylsilyl)amine]] (HMDS) on silicon wafers.<ref>{{cite web|url=https://www.microsi.com/product-category/lithography/adhesion-promoters/|title=HMDS primer (hexamethyldisilazane), DEATS and PGMEA|publisher=}}</ref> The compound is often the most abundant airborne, molecular [[contamination]] (AMC) in semiconductor cleanrooms,<ref>http://www.balazs.com/file/otherelement/pj/1_amc_guidelines_rev2.34642.pdf</ref> due to its evaporation into ambient air.


[[File:PGMEA vapor pressure.png|thumbnail|right|Vapor Pressure Curve for PGMEA vs. Water]]
[[File:PGMEA vapor pressure.png|thumbnail|right|Vapor Pressure Curve for PGMEA vs. Water]]

Revision as of 08:12, 2 December 2016

Propylene glycol methyl ether acetate
Names
IUPAC name
1-Methoxy-2-propanyl acetate
Other names
PGMEA; 1-Methoxy-2-propanol acetate
Identifiers
3D model (JSmol)
ChemSpider
ECHA InfoCard 100.003.277 Edit this at Wikidata
UNII
  • InChI=1S/C6H12O3/c1-5(4-8-3)9-6(2)7/h5H,4H2,1-3H3
    Key: LLHKCFNBLRBOGN-UHFFFAOYSA-N
  • InChI=1/C6H12O3/c1-5(4-8-3)9-6(2)7/h5H,4H2,1-3H3
    Key: LLHKCFNBLRBOGN-UHFFFAOYAD
  • CC(COC)OC(=O)C
Properties
C6H12O3
Molar mass 132.159 g·mol−1
Hazards
GHS labelling:
Template:H226, Template:H360 , Template:H402
NFPA 704 (fire diamond)
NFPA 704 four-colored diamondHealth 1: Exposure would cause irritation but only minor residual injury. E.g. turpentineFlammability 2: Must be moderately heated or exposed to relatively high ambient temperature before ignition can occur. Flash point between 38 and 93 °C (100 and 200 °F). E.g. diesel fuelInstability 0: Normally stable, even under fire exposure conditions, and is not reactive with water. E.g. liquid nitrogenSpecial hazards (white): no code
1
2
0
Flash point 43 °C (109 °F; 316 K)
333 °C (631 °F; 606 K)
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).

Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA[2] and by Shell Chemical under the name methyl proxitol acetate.[3][4]

In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers.[5] The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms,[6] due to its evaporation into ambient air.

Vapor Pressure Curve for PGMEA vs. Water

References

  1. ^ GOV, NOAA Office of Response and Restoration, US. "PROPYLENE GLYCOL METHYL ETHER ACETATE - CAMEO Chemicals - NOAA".{{cite web}}: CS1 maint: multiple names: authors list (link)
  2. ^ http://www.dow.com/scripts/litorder.asp?filepath=oxysolvents/pdfs/noreg/110-00588.pdf
  3. ^ http://s00.static-shell.com/content/dam/shell/static/chemicals/downloads/responsible-energy/methylproxitol-pgmemethylproxitolacetatepgmeaproductstewardships.pdf
  4. ^ "Methyl PROXITOL".
  5. ^ "HMDS primer (hexamethyldisilazane), DEATS and PGMEA".
  6. ^ http://www.balazs.com/file/otherelement/pj/1_amc_guidelines_rev2.34642.pdf
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