Markku Leskelä
Markku Leskelä | |
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| Born | 1950 (age 73–74) |
| Nationality | Finnish |
| Scientific career | |
| Fields | Chemistry, Inorganic Chemistry |
| Institutions | University of Helsinki |
Markku Leskelä (born 1950) is a Finnish chemist and professor emeritus at University of Helsinki, known for his leading research in atomic layer deposition (ALD).[1][2]
Markku Leskelä was the leader of the Finnish Centre of Excellence in ALD (2012-2017) by the University of Helsinki and VTT Technical Research Centre of Finland.
Markku Leskelä started ALD research (then called atomic layer epitaxy) in the early 1980s at Helsinki University of Technology (nowadays Aalto University) with Prof. Lauri Niinistö.[3] In 2012, he received the ALD Innovation Prize at the international ALD conference.[4]
References
[edit]- ^ "Markku Leskelä - Professor of Inorganic Chemistry". www.helsinki.fi.
- ^ "Markku Leskelä - Helsingin yliopiston tutkimusportaali - Helsingin yliopisto". tuhat.halvi.helsinki.fi.
- ^ "Exhibition material "40 Years of ALD in Finland - Photos, Stories"" (PDF). November 29, 2014. Retrieved September 20, 2016.
- ^ Puurunen, Riikka (August 3, 2016). "ALD Innovation Prize to Dr. Suvi Haukka, ASM". Retrieved September 20, 2016 – via http://aldhistory.blogspot.fi/2016/08/ald-innovation-prize-to-dr-suvi-haukka.html.
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