Propylene glycol methyl ether acetate
Appearance
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Names | |
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IUPAC name
1-Methoxy-2-propanyl acetate
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Other names
PGMEA; 1-Methoxy-2-propanol acetate
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Identifiers | |
3D model (JSmol)
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ChemSpider | |
ECHA InfoCard | 100.003.277 |
PubChem CID
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UNII | |
CompTox Dashboard (EPA)
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Properties | |
C6H12O3 | |
Molar mass | 132.159 g·mol−1 |
Hazards | |
GHS labelling: | |
Template:H226, Template:H360 , Template:H402 | |
NFPA 704 (fire diamond) | |
Flash point | 43 °C (109 °F; 316 K) |
333 °C (631 °F; 606 K) | |
Except where otherwise noted, data are given for materials in their standard state (at 25 °C [77 °F], 100 kPa).
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Propylene glycol methyl ether acetate (PGMEA, 1-methoxy-2-propanol acetate) is a P-type glycol ether used in inks, coatings, and cleaners. It is sold by Dow Chemical under the name Dowanol PMA[2] and by Shell Chemical under the name methyl proxitol acetate.[3][4]
In the semiconductor industry, PGMEA is a commonly used solvent, primarily for the application of surface adherents such as Bis(trimethylsilyl)amine (HMDS) on silicon wafers.[5] The compound is often the most abundant airborne, molecular contamination (AMC) in semiconductor cleanrooms,[6] due to its evaporation into ambient air.
![](http://upload.wikimedia.org/wikipedia/en/thumb/e/e6/PGMEA_vapor_pressure.png/220px-PGMEA_vapor_pressure.png)
References
- ^ http://cameochemicals.noaa.gov/chemical/24058
- ^ http://www.dow.com/scripts/litorder.asp?filepath=oxysolvents/pdfs/noreg/110-00588.pdf
- ^ http://s00.static-shell.com/content/dam/shell/static/chemicals/downloads/responsible-energy/methylproxitol-pgmemethylproxitolacetatepgmeaproductstewardships.pdf
- ^ http://www.shell.com/global/products-services/solutions-for-businesses/chemicals/products/solvents/chemical-solvents/glycol-ethers/methyl-proxitol.html
- ^ https://www.microsi.com/product-category/lithography/adhesion-promoters/
- ^ http://www.balazs.com/file/otherelement/pj/1_amc_guidelines_rev2.34642.pdf