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Spacer_Patterning.JPG (393 × 576 pixels, file size: 19 KB, MIME type: image/jpeg)

Summary

Description
English: Spacer patterning:
  • First pattern
  • Deposition of mask material
  • Etching to form sidewall spacers
  • Removal of first pattern
  • Etching using remaining spacers as mask
  • Removal of spacers, leaving final pattern
Date
Source Own work (Original caption: "
Own work
")
Transferred from en.wikipedia to Commons by User:Cepheiden using CommonsHelper.
Author Guiding light at en.wikipedia
Other versions
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Licensing

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Original upload log

The original description page was here. All following user names refer to en.wikipedia.
  • 2008-03-08 14:07 Guiding light 393×576× (19013 bytes) Spacer patterning: * First pattern * Deposition of mask material * Etching to form sidewall spacers * Removal of first pattern * Etching using remaining spacers as mask * Removal of spacers, leaving final pattern

Captions

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depicts

inception

8 March 2008

File history

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Date/TimeThumbnailDimensionsUserComment
current13:16, 6 November 2011Thumbnail for version as of 13:16, 6 November 2011393 × 576 (19 KB)File Upload Bot (Magnus Manske) {{BotMoveToCommons|en.wikipedia|year={{subst:CURRENTYEAR}}|month={{subst:CURRENTMONTHNAME}}|day={{subst:CURRENTDAY}}}} {{Information |Description={{en|Spacer patterning: * First pattern * Deposition of mask material * Etching to form sidewall spacers * R

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