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Ethylenediamine pyrocatechol

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This is an old revision of this page, as edited by Hatchens (talk | contribs) at 03:24, 5 February 2021 (Importing Wikidata short description: "Etchant solution" (Shortdesc helper)). The present address (URL) is a permanent link to this revision, which may differ significantly from the current revision.

Ethylenediamine pyrocatechol (EDP), also known as ethylenediamine-pyrocatechol-water (EPW), is an anisotropic etchant solution for silicon. A typical formulation consists of ethylenediamine, pyrocatechol, pyrazine and water. It is carcinogenic and very corrosive. It is mainly used in research labs, and is not used in mainstream semiconductor fabrication processes.

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