File:Different multipatterning techniques.png
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Summary
| Description |
English: Top: When two features must maintain a minimum distance, they may need to be split up onto different masks (indicated by different colors). Center: By applying self-aligned patterning with a spacer (not shown), fewer masks can be used. Moreover, the leftover gap between spacers may pattern additional features. Bottom: A cut mask uses an opposite polarity feature to separate features that were previously part of one shape. |
| Date | |
| Source |
.svg){kind=small} This diagram was created with Microsoft Excel. |
| Author | Guiding light |
Licensing
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Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License. |
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References
1. US Patent 8312394, assigned to Synopsys.
2. US Patent 9177797, assigned to TSMC.
3. A. Malika et al., Proc. SPIE 9048, 90481R (2014).
4. R. Baert et al., IITC/MAM 2015.
File history
Click on a date/time to view the file as it appeared at that time.
| Date/Time | Thumbnail | Dimensions | User | Comment | |
|---|---|---|---|---|---|
| current | 00:11, 5 January 2020 | | 767 × 1,277 (27 KB) | Guiding light | put missing spacer label |
| 13:22, 4 January 2020 |  | 769 × 1,277 (27 KB) | Guiding light | add cut label | |
| 10:05, 4 January 2020 |  | 769 × 1,277 (26 KB) | Guiding light | small drawing correction | |
| 09:51, 4 January 2020 |  | 769 × 1,277 (26 KB) | Guiding light | re-label LE3 as LELELE | |
| 09:23, 4 January 2020 |  | 769 × 1,277 (27 KB) | Guiding light | Small drawing correction | |
| 09:20, 4 January 2020 |  | 769 × 1,277 (27 KB) | Guiding light | New example including LE3 | |
| 11:57, 6 November 2019 |  | 479 × 871 (11 KB) | Guiding light | label corrections | |
| 00:45, 6 November 2019 |  | 369 × 652 (6 KB) | Guiding light | ||
| 00:44, 6 November 2019 |  | 369 × 652 (6 KB) | Guiding light | ||
| 00:43, 6 November 2019 |  | 369 × 652 (6 KB) | Guiding light |
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