Jump to content

File:Different multipatterning techniques.png

Page contents not supported in other languages.
This is a file from the Wikimedia Commons
From Wikipedia, the free encyclopedia

Original file (767 × 1,277 pixels, file size: 27 KB, MIME type: image/png)

Summary

Description
English: Top: When two features must maintain a minimum distance, they may need to be split up onto different masks (indicated by different colors). Center: By applying self-aligned patterning with a spacer (not shown), fewer masks can be used. Moreover, the leftover gap between spacers may pattern additional features. Bottom: A cut mask uses an opposite polarity feature to separate features that were previously part of one shape.
Date
Source
 
This diagram was created with Microsoft Excel.
Author Guiding light

Licensing

I, the copyright holder of this work, hereby publish it under the following licenses:
GNU head Permission is granted to copy, distribute and/or modify this document under the terms of the GNU Free Documentation License, Version 1.2 or any later version published by the Free Software Foundation; with no Invariant Sections, no Front-Cover Texts, and no Back-Cover Texts. A copy of the license is included in the section entitled GNU Free Documentation License.
w:en:Creative Commons
attribution share alike
This file is licensed under the Creative Commons Attribution-Share Alike 4.0 International license.
You are free:
  • to share – to copy, distribute and transmit the work
  • to remix – to adapt the work
Under the following conditions:
  • attribution – You must give appropriate credit, provide a link to the license, and indicate if changes were made. You may do so in any reasonable manner, but not in any way that suggests the licensor endorses you or your use.
  • share alike – If you remix, transform, or build upon the material, you must distribute your contributions under the same or compatible license as the original.
You may select the license of your choice.

References

1. US Patent 8312394, assigned to Synopsys.
2. US Patent 9177797, assigned to TSMC.
3. A. Malika et al., Proc. SPIE 9048, 90481R (2014).
4. R. Baert et al., IITC/MAM 2015.

Captions

Add a one-line explanation of what this file represents

Items portrayed in this file

depicts

20 October 2018

image/png

File history

Click on a date/time to view the file as it appeared at that time.

(newest | oldest) View (newer 10 | ) (10 | 20 | 50 | 100 | 250 | 500)
Date/TimeThumbnailDimensionsUserComment
current00:11, 5 January 2020Thumbnail for version as of 00:11, 5 January 2020767 × 1,277 (27 KB)Guiding lightput missing spacer label
13:22, 4 January 2020Thumbnail for version as of 13:22, 4 January 2020769 × 1,277 (27 KB)Guiding lightadd cut label
10:05, 4 January 2020Thumbnail for version as of 10:05, 4 January 2020769 × 1,277 (26 KB)Guiding lightsmall drawing correction
09:51, 4 January 2020Thumbnail for version as of 09:51, 4 January 2020769 × 1,277 (26 KB)Guiding lightre-label LE3 as LELELE
09:23, 4 January 2020Thumbnail for version as of 09:23, 4 January 2020769 × 1,277 (27 KB)Guiding lightSmall drawing correction
09:20, 4 January 2020Thumbnail for version as of 09:20, 4 January 2020769 × 1,277 (27 KB)Guiding lightNew example including LE3
11:57, 6 November 2019Thumbnail for version as of 11:57, 6 November 2019479 × 871 (11 KB)Guiding lightlabel corrections
00:45, 6 November 2019Thumbnail for version as of 00:45, 6 November 2019369 × 652 (6 KB)Guiding light
00:44, 6 November 2019Thumbnail for version as of 00:44, 6 November 2019369 × 652 (6 KB)Guiding light
00:43, 6 November 2019Thumbnail for version as of 00:43, 6 November 2019369 × 652 (6 KB)Guiding light
(newest | oldest) View (newer 10 | ) (10 | 20 | 50 | 100 | 250 | 500)

The following page uses this file:

Metadata