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A microactuator is a microscopic servomechanism that supplies and transmits a measured amount of energy for the operation of another mechanism or system. As a general actuator, following standards have to be met.

  • Large travel
  • High precision
  • Fast switching
  • Low power consumption
  • Power free force sustainability

For microactuator, there are two in addition

Principle of microactuators[edit]

The basic principle can be described as the expression for mechanical work
W=\overrightarrow{F}\cdot \Delta \overrightarrow{r}
since an actuator is to manipulate positions and therefore force is needed. For different kind of microactuators, different physical principles are applied.

Classes of microactuators[edit]

See also[edit]