Talk:Proximity effect (electron beam lithography)
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Significant rewrite, backscattering major source of long rang effects, forward scattering leads to medium range effects. 2 gaussian model. Secondary electron short range effects described but not modelled since their range is of the order of the beam size. Mhesselb (talk) 12:03, 9 March 2008 (UTC)
I like it! Guiding light (talk) 10:48, 1 April 2008 (UTC)