Extreme ultraviolet lithography: Revision history

28 July 2024

• curprev 04:3604:36, 28 July 2024‎ WikiCleanerBot talk contribs‎ m 118,698 bytes 0‎ v2.05b - Bot T20 CW#61 - Fix errors for CW project (Reference before punctuation) undo Tag: WPCleaner

22 July 2024

• curprev 02:2002:20, 22 July 2024‎ Guiding light talk contribs‎ 118,698 bytes −219‎ more concise, density is true impact undo

21 July 2024

• curprev 15:4515:45, 21 July 2024‎ Guiding light talk contribs‎ m 118,917 bytes −93‎ →‎Market Growth Projection undo
• curprev 14:3014:30, 21 July 2024‎ Guiding light talk contribs‎ 119,010 bytes −147‎ →‎History and Economic Impact undo
• curprev 12:3212:32, 21 July 2024‎ 2001:b011:e003:10cf:ac20:81ec:9d8f:7957 talk‎ 119,157 bytes −148‎ Economic impact merged into History undo
• curprev 11:1911:19, 21 July 2024‎ 2001:b011:e003:10cf:ac20:81ec:9d8f:7957 talk‎ 119,305 bytes +69‎ →‎EUV-induced plasma undo
• curprev 11:1611:16, 21 July 2024‎ 2001:b011:e003:10cf:ac20:81ec:9d8f:7957 talk‎ 119,236 bytes +695‎ →‎EUV-induced plasma: nanoparticles undo

4 July 2024

• curprev 14:0014:00, 4 July 2024‎ Rohithpuri talk contribs‎ m 118,541 bytes +1,614‎ I've added a new section "Economic Impact" after "History" to explain how EUV lithography's role in miniaturization drives market growth. This section highlights the increasing demand for EUV technology and its impact on the semiconductor industry, referencing Pragma Market Research for market size projections. undo Tag: Visual edit

3 July 2024

• curprev 22:0522:05, 3 July 2024‎ Citation bot talk contribs‎ 116,927 bytes +274‎ Alter: title, template type. Add: pages, chapter, chapter-url, date, editors 1-1. Removed or converted URL. | Use this bot. Report bugs. | Suggested by Abductive | Category:Articles with specifically marked weasel-worded phrases from June 2024 | #UCB_Category 186/386 undo

29 June 2024

• curprev 08:4608:46, 29 June 2024‎ Voidvector talk contribs‎ 116,653 bytes +60‎ →‎History: add {{cn}} and {{by whom}} - citation from eetimes does not contain verbiage indicating Congress' stance at the time undo

26 June 2024

• curprev 13:1513:15, 26 June 2024‎ 2001:b011:e003:58f6:e5ad:4791:7348:391d talk‎ 116,593 bytes −105‎ →‎EUV stochastic issues undo
• curprev 13:1013:10, 26 June 2024‎ 2001:b011:e003:58f6:e5ad:4791:7348:391d talk‎ 116,698 bytes +240‎ →‎EUV stochastic issues: 2024 update undo

19 June 2024

• curprev 01:4301:43, 19 June 2024‎ WikiCleanerBot talk contribs‎ m 116,458 bytes 0‎ v2.05b - Bot T19 CW#25 - Fix errors for CW project (Heading hierarchy) undo Tag: WPCleaner

13 June 2024

• curprev 04:2904:29, 13 June 2024‎ Real4jyy talk contribs‎ 116,458 bytes −4‎ MOS:NOSECTIONLINKS undo Tag: Visual edit

9 June 2024

• curprev 06:0406:04, 9 June 2024‎ 2001:b011:e003:5177:c9e2:504f:c53d:ab12 talk‎ 116,462 bytes +166‎ →‎EUV stochastic issues undo
• curprev 05:5305:53, 9 June 2024‎ Guiding light talk contribs‎ 116,296 bytes −35‎ completed cleanup undo
• curprev 05:5105:51, 9 June 2024‎ Guiding light talk contribs‎ 116,331 bytes −26‎ →‎EUV stochastic issues undo
• curprev 05:4905:49, 9 June 2024‎ Guiding light talk contribs‎ 116,357 bytes −1,265‎ →‎EUV photoresist exposure: the role of electrons undo
• curprev 05:4605:46, 9 June 2024‎ Guiding light talk contribs‎ 117,622 bytes −109‎ →‎EUV stochastic issues undo
• curprev 05:4505:45, 9 June 2024‎ Guiding light talk contribs‎ 117,731 bytes −113‎ →‎EUV stochastic issues undo
• curprev 05:4305:43, 9 June 2024‎ Guiding light talk contribs‎ 117,844 bytes −210‎ →‎Use with multiple-patterning undo
• curprev 05:3805:38, 9 June 2024‎ 2001:b011:e003:5177:c9e2:504f:c53d:ab12 talk‎ 118,054 bytes −280‎ →‎EUV stochastic issues undo Tag: references removed
• curprev 05:3605:36, 9 June 2024‎ 2001:b011:e003:5177:c9e2:504f:c53d:ab12 talk‎ 118,334 bytes −14‎ →‎Single-patterning extension: anamorphic high-NA undo
• curprev 05:3505:35, 9 June 2024‎ 2001:b011:e003:5177:c9e2:504f:c53d:ab12 talk‎ 118,348 bytes −14‎ →‎Single-patterning extension: anamorphic high-NA undo
• curprev 05:3405:34, 9 June 2024‎ 2001:b011:e003:5177:c9e2:504f:c53d:ab12 talk‎ 118,362 bytes −191‎ →‎Single-patterning extension: anamorphic high-NA undo
• curprev 05:3305:33, 9 June 2024‎ 2001:b011:e003:5177:c9e2:504f:c53d:ab12 talk‎ 118,553 bytes −161‎ →‎Pupil Fill Ratio undo
• curprev 05:3305:33, 9 June 2024‎ 2001:b011:e003:5177:c9e2:504f:c53d:ab12 talk‎ 118,714 bytes −1‎ →‎Pupil Fill Ratio undo
• curprev 05:3205:32, 9 June 2024‎ 2001:b011:e003:5177:c9e2:504f:c53d:ab12 talk‎ 118,715 bytes −2,043‎ →‎Single-patterning extension: anamorphic high-NA: cleanup undo Tag: references removed
• curprev 05:2505:25, 9 June 2024‎ 2001:b011:e003:5177:c9e2:504f:c53d:ab12 talk‎ 120,758 bytes −88‎ →‎EUV stochastic issues undo
• curprev 05:2305:23, 9 June 2024‎ 2001:b011:e003:5177:c9e2:504f:c53d:ab12 talk‎ 120,846 bytes +60‎ →‎EUV stochastic issues undo
• curprev 05:1805:18, 9 June 2024‎ 2001:b011:e003:5177:7db8:57f7:45f0:26da talk‎ 120,786 bytes −5,642‎ →‎EUV stochastic issues: cleanup undo
• curprev 05:0605:06, 9 June 2024‎ AnomieBOT talk contribs‎ 126,428 bytes +441‎ Rescuing orphaned refs ("dosehelp" from rev 1227238731; "abs" from rev 1227238731; "esf" from rev 1227238731) undo
• curprev 04:5504:55, 9 June 2024‎ Guiding light talk contribs‎ 125,987 bytes −14,246‎ cleanup started undo

4 June 2024

• curprev 15:5415:54, 4 June 2024‎ Josve05a talk contribs‎ m 140,233 bytes +34‎ Added {{Self-published}} tag undo Tag: Twinkle
• curprev 15:5315:53, 4 June 2024‎ Josve05a talk contribs‎ 140,199 bytes +233‎ →‎EUV-induced plasma: | Altered template type. Add: bibcode, pmid, doi-access, doi, page, issue, volume, journal, title, date, pmc, authors 1-3. Removed URL that duplicated identifier. Changed bare reference to CS1/2. | Use this tool. Report bugs. | #UCB_Gadget undo

15 May 2024

• curprev 18:0218:02, 15 May 2024‎ 98.115.164.53 talk‎ 139,966 bytes −9‎ +style undo

4 May 2024

• curprev 22:3322:33, 4 May 2024‎ LouScheffer talk contribs‎ 139,975 bytes +229‎ →‎Fab tool output: Expand rather cryptic table headings. Also steppers usually quoted in wafers per hour. undo

28 April 2024

• curprev 16:2516:25, 28 April 2024‎ 2001:b011:e003:373e:d1c1:8c79:97b5:fc64 talk‎ 139,746 bytes +164‎ →‎Single-patterning extension: anamorphic high-NA undo

21 April 2024

• curprev 10:1910:19, 21 April 2024‎ 2001:b011:e003:1893:4fa:718d:ae34:3ed5 talk‎ 139,582 bytes +187‎ →‎Impact of photoelectron and secondary electron travel on resolution undo

13 April 2024

• curprev 10:5810:58, 13 April 2024‎ 2001:b011:e003:548e:c0ee:fe39:4bf3:39a8 talk‎ 139,395 bytes +103‎ →‎Impact of photoelectron and secondary electron travel on resolution undo

5 April 2024

• curprev 16:3216:32, 5 April 2024‎ Citation bot talk contribs‎ 139,292 bytes +19‎ Altered title. Added website. | Use this bot. Report bugs. | Suggested by Whoop whoop pull up | #UCB_webform 818/3364 undo

4 April 2024

• curprev 18:3418:34, 4 April 2024‎ 2001:1c00:2e2a:6500:f821:28e4:6174:9f19 talk‎ 139,273 bytes +60‎ saw in a video of intel themselfs that a machine weigst nearly 200 tons. i thought it was a better source than ed.nl. undo

3 April 2024

• curprev 01:5601:56, 3 April 2024‎ InternetArchiveBot talk contribs‎ 139,213 bytes +196‎ Rescuing 1 sources and tagging 0 as dead.) #IABot (v2.0.9.5) (Whoop whoop pull up - 18543 undo

24 March 2024

• curprev 07:4507:45, 24 March 2024‎ InternetArchiveBot talk contribs‎ 139,017 bytes +813‎ Rescuing 4 sources and tagging 0 as dead.) #IABot (v2.0.9.5 undo

22 March 2024

• curprev 01:0801:08, 22 March 2024‎ Guiding light talk contribs‎ 138,204 bytes 0‎ →‎EUV-induced plasma undo
• curprev 01:0701:07, 22 March 2024‎ Guiding light talk contribs‎ 138,204 bytes +68‎ →‎EUV-induced plasma undo

21 March 2024

• curprev 14:5414:54, 21 March 2024‎ Guiding light talk contribs‎ m 138,136 bytes +175‎ →‎EUV-induced plasma: figure undo
• curprev 14:4214:42, 21 March 2024‎ Guiding light talk contribs‎ 137,961 bytes +355‎ →‎EUV-induced plasma undo
• curprev 14:3614:36, 21 March 2024‎ Guiding light talk contribs‎ m 137,606 bytes −530‎ →‎Impact of photoelectron and secondary electron travel on resolution: cleanup undo

18 March 2024

• curprev 04:3204:32, 18 March 2024‎ Guiding light talk contribs‎ 138,136 bytes +215‎ →‎EUV stochastic issues undo