Copper interconnects: Revision history

25 August 2024

• curprev 20:0820:08, 25 August 2024‎ GreenC bot talk contribs‎ 11,700 bytes +166‎ Rescued 1 archive link. Wayback Medic 2.5 per WP:URLREQ#www-03.ibm.com undo

16 October 2023

• curprev 03:1203:12, 16 October 2023‎ Deutsche Femboy talk contribs‎ m 11,534 bytes +19‎ →‎Superconformal electrodeposition of copper: added proper link for low kappa dielectrics undo Tag: Visual edit

22 July 2023

• curprev 21:4521:45, 22 July 2023‎ Walter Tau talk contribs‎ m 11,515 bytes +31‎ →‎Superconformal electrodeposition of copper undo

17 February 2023

• curprev 15:1415:14, 17 February 2023‎ Walter Tau talk contribs‎ 11,484 bytes +28‎ →‎Superconformal electrodeposition of copper: added cross-links undo
• curprev 15:0815:08, 17 February 2023‎ Phuzion talk contribs‎ 11,456 bytes +1‎ Moved images per request in IRC undo
• curprev 14:5714:57, 17 February 2023‎ Walter Tau talk contribs‎ m 11,455 bytes +1‎ trying to move this figure from Patterning to ==Superconformal electrodeposition of copper== undo

15 February 2023

• curprev 16:0516:05, 15 February 2023‎ Walter Tau talk contribs‎ 11,454 bytes +347‎ →‎Superconformal electrodeposition of copper undo
• curprev 15:0215:02, 15 February 2023‎ Walter Tau talk contribs‎ 11,107 bytes +147‎ →‎Superconformal electrodeposition of copper undo
• curprev 14:5814:58, 15 February 2023‎ Walter Tau talk contribs‎ m 10,960 bytes +7‎ →‎Superconformal electrodeposition of copper undo
• curprev 12:5412:54, 15 February 2023‎ Walter Tau talk contribs‎ 10,953 bytes +209‎ →‎Superconformal electrodeposition of copper: <ref>Jhothiraman, J.K. and Balachandran, R. (2019) Electroplating: Applications in the Semiconductor Industry. Advances in Chemical Engineering and Science, 9, 239-261. https://doi.org/10.4236/aces.2019.92018</ref> undo
• curprev 01:0401:04, 15 February 2023‎ Walter Tau talk contribs‎ 10,744 bytes +3,019‎ →‎Superconformal electrodeposition of copper: wrote a section about history and mechanism with references. undo

14 February 2023

• curprev 23:2223:22, 14 February 2023‎ Walter Tau talk contribs‎ 7,725 bytes +483‎ added historic figure. I will write a more detailed history section later. In the late 1990's I was one of the pioneers of this method, and it looks like not much changed since. undo
• curprev 19:4219:42, 14 February 2023‎ Walter Tau talk contribs‎ m 7,242 bytes +48‎ This Topic has been asking to be written for years. I guess, I have to do it myself. Please give me a few days to complete. undo

24 September 2022

• curprev 16:0316:03, 24 September 2022‎ AnomieBOT talk contribs‎ m 7,194 bytes +60‎ Dating maintenance tags: {{Cn}} undo
• curprev 15:4215:42, 24 September 2022‎ Citation bot talk contribs‎ 7,134 bytes +19‎ Add: date. | Use this bot. Report bugs. | Suggested by Headbomb | #UCB_toolbar undo
• curprev 15:4215:42, 24 September 2022‎ Headbomb talk contribs‎ 7,115 bytes −10‎ misesed one undo
• curprev 15:4215:42, 24 September 2022‎ Headbomb talk contribs‎ 7,125 bytes −447‎ vanity press undo

4 September 2022

• curprev 02:2602:26, 4 September 2022‎ Adakiko talk contribs‎ 7,572 bytes −603‎ →‎Patterning: rm predatory ref undo
• curprev 02:2502:25, 4 September 2022‎ Adakiko talk contribs‎ 8,175 bytes +1,078‎ →‎Patterning: add ref to paper Copper Metal for Semiconductor Interconnects undo Tag: use of predatory open access journal

5 May 2021

• curprev 22:3222:32, 5 May 2021‎ OAbot talk contribs‎ m 7,097 bytes +16‎ Open access bot: doi added to citation with #oabot. undo

24 December 2020

• curprev 09:1409:14, 24 December 2020‎ DubleH talk contribs‎ 7,081 bytes +39‎ Wrote the beginning to start with an actual definition, which crucially includes the link to the correct page for what "interconnect" means in the context of integrated circuits. undo Tags: Mobile edit Mobile web edit
• curprev 09:1009:10, 24 December 2020‎ DubleH talk contribs‎ 7,042 bytes +38‎ Included link to correct page for what "interconnect" means in this context undo Tags: Mobile edit Mobile web edit

18 October 2020

• curprev 06:3906:39, 18 October 2020‎ Citation bot talk contribs‎ 7,004 bytes +17‎ Add: s2cid, author pars. 1-1. Removed parameters. Some additions/deletions were actually parameter name changes. | You can use this bot yourself. Report bugs here. | Suggested by Abductive | Category:Integrated circuits | via #UCB_Category 41/189 undo

8 September 2020

• curprev 09:0509:05, 8 September 2020‎ Widefox talk contribs‎ 6,987 bytes +64‎ Importing Wikidata short description: "Used in semiconductor integrated circuits" (Shortdesc helper) undo

15 August 2020

• curprev 22:0322:03, 15 August 2020‎ FrescoBot talk contribs‎ m 6,923 bytes −25‎ Bot: link specificity and minor changes undo

1 December 2019

• curprev 06:1206:12, 1 December 2019‎ Citation bot talk contribs‎ m 6,948 bytes −45‎ Removed URL that duplicated unique identifier. | You can use this bot yourself. Report bugs here.| Activated by User:Nemo bis | via #UCB_webform undo

25 June 2019

• curprev 17:5617:56, 25 June 2019‎ 87.75.117.183 talk‎ 6,993 bytes +20‎ →‎Barrier metal: Replaced chemical symbols with real names undo

14 March 2019

• curprev 02:2202:22, 14 March 2019‎ Citation bot talk contribs‎ m 6,973 bytes +12‎ Add: pages. | You can use this bot yourself. Report bugs here. | User-activated. undo

14 January 2019

• curprev 01:1801:18, 14 January 2019‎ 99Electrons talk contribs‎ 6,961 bytes +54‎ No edit summary undo
• curprev 01:1701:17, 14 January 2019‎ 99Electrons talk contribs‎ 6,907 bytes +5‎ →‎Notes undo

7 January 2019

• curprev 22:4422:44, 7 January 2019‎ 99Electrons talk contribs‎ m 6,902 bytes 0‎ 99Electrons moved page Copper interconnect to Copper interconnects: Per WP:PLURAL undo

5 January 2019

• curprev 04:4204:42, 5 January 2019‎ 99Electrons talk contribs‎ m 6,902 bytes +1‎ →‎Barrier metal: Missing space undo
• curprev 04:4104:41, 5 January 2019‎ 99Electrons talk contribs‎ m 6,901 bytes −7‎ Interconnect, not interconnections undo
• curprev 04:3904:39, 5 January 2019‎ 99Electrons talk contribs‎ 6,908 bytes +27‎ →‎top: Clarified undo
• curprev 04:3504:35, 5 January 2019‎ 99Electrons talk contribs‎ m 6,881 bytes −7‎ →‎top: Redundant undo
• curprev 04:3504:35, 5 January 2019‎ 99Electrons talk contribs‎ m 6,888 bytes +22‎ →‎top: Added wikilinks undo
• curprev 04:3404:34, 5 January 2019‎ 99Electrons talk contribs‎ 6,866 bytes −10‎ →‎top: "Copper-based chips" isn't a term of art; this phraseology is typically used to refer to the substrate material undo
• curprev 04:2304:23, 5 January 2019‎ 99Electrons talk contribs‎ 6,876 bytes +3‎ →‎top: Copper interconnects didn't just benefit processors undo
• curprev 04:1104:11, 5 January 2019‎ 99Electrons talk contribs‎ 6,873 bytes +60‎ →‎Patterning: Clarified; the text implied that multilayer interconnects had to have at least 5 to 10 layers, which is untrue undo
• curprev 04:0704:07, 5 January 2019‎ 99Electrons talk contribs‎ 6,813 bytes +108‎ Undid revision 743112085 by Volker Siegel (talk) The claim that CMP wouldn't be needed if there had been R&D in alternative technologies is original research; any basic semiconductor technology textbook will state that CMP is a necessity for ICs with multi-layer interconnects and sub-micron feature sizes undo Tag: Undo
• curprev 03:3303:33, 5 January 2019‎ 99Electrons talk contribs‎ 6,705 bytes −31‎ →‎top: Clarified: interconnects are structures; BEOL is the stage in fabrication where interconnects are formed undo

23 June 2018

• curprev 06:0106:01, 23 June 2018‎ Bibcode Bot talk contribs‎ m 6,736 bytes +28‎ Adding 0 arxiv eprint(s), 1 bibcode(s) and 0 doi(s). Did it miss something? Report bugs, errors, and suggestions at User talk:Bibcode Bot undo

11 June 2018

• curprev 22:2622:26, 11 June 2018‎ 171.66.213.195 talk‎ 6,708 bytes +11‎ Fixed Cu3Ge subscript undo

17 October 2016

• curprev 13:0513:05, 17 October 2016‎ HBook talk contribs‎ 6,697 bytes +21‎ →‎Barrier metal: wikilink undo

7 October 2016

• curprev 22:1222:12, 7 October 2016‎ Volker Siegel talk contribs‎ 6,676 bytes −108‎ →‎Patterning: Rewriting section reading like an advertisement for CMP, stating "it would not be possible without CMP". Just as with CMP, it requires R&D to do without. Keeping the interesting facts. undo

13 July 2016

• curprev 06:5906:59, 13 July 2016‎ BG19bot talk contribs‎ m 6,784 bytes 0‎ →‎Barrier metal: WP:CHECKWIKI error fix for #61. Punctuation goes before References. Do general fixes if a problem exists. - undo

12 July 2016

• curprev 02:1002:10, 12 July 2016‎ Rontafrank talk contribs‎ m 6,784 bytes +791‎ New up-to-date information on this topic is added to the current entry. No old information is deleted or modified. undo Tag: Visual edit

14 January 2016

• curprev 12:3412:34, 14 January 2016‎ ScotXW talk contribs‎ 5,993 bytes +27‎ No edit summary undo
• curprev 01:5901:59, 14 January 2016‎ Citation bot talk contribs‎ m 5,966 bytes +426‎ Add: bibcode, year, pages, issue, volume, journal, title, pmid, author pars. 1-3. You can use this bot yourself. Report bugs here. undo
• curprev 01:5801:58, 14 January 2016‎ AManWithNoPlan talk contribs‎ 5,540 bytes +16‎ cite doi should not be used undo