3 nm process

In semiconductor manufacturing, the 3 nm process is the next die shrink after the 5-nanometre MOSFET technology node. As of 2019, Samsung and TSMC have announced plans to put a 3 nm semiconductor node into commercial production. It is based on GAAFET (gate-all-around field-effect transistor) technology, a type of multi-gate MOSFET technology.

History

Research and technology demos

In 1985, a Nippon Telegraph and Telephone (NTT) research team fabricated a MOSFET (NMOS) device with a channel length of 150 nm and gate oxide thickness of 2.5 nm.^[1] In 1998, an Advanced Micro Devices (AMD) research team fabricated a MOSFET (NMOS) device with a channel length of 50 nm and oxide thickness of 1.3 nm.^[2]^[3]

In 2003, a research team at NEC fabricated the first MOSFETs with a channel length of 3 nm, using the PMOS and NMOS processes.^[4]^[5] In 2006, a team from the Korea Advanced Institute of Science and Technology (KAIST) and the National Nano Fab Center, developed a 3 nm width multi-gate MOSFET, the world's smallest nanoelectronic device, based on gate-all-around (GAAFET) technology.^[6]^[7]

Commercialization history

In late 2016, TSMC announced plans to construct a 5 nm–3 nm node semiconductor fabrication plant with a co-commitment investment of around US$15.7 billion.^[8]

In 2017, TSMC announced it was to begin construction of the 3 nm semiconductor fabrication plant at the Tainan Science Park in Taiwan.^[9] TSMC plans to start volume production of the 3 nm process node in 2023.^[10]^[11]^[12]^[13]^[14]

In early 2018, IMEC and Cadence stated they had taped out 3 nm test chips, using extreme ultraviolet lithography (EUV) and 193 nm immersion lithography.^[15]

In early 2019, Samsung presented plans to manufacture 3 nm GAAFET (gate-all-around field-effect transistors) at the 3 nm node in 2021;^[16]^[17] Samsung's semiconductor roadmap also included products at 8, 7, 6, 5, and 4 nm 'nodes'.^[18]^[19]

In December 2019, Intel announced plans for 3 nm production in 2025.^[20]

In January 2020, Samsung announced the production of the world's first 3 nm GAAFET process prototype, and said that it is targeting mass production in 2021.^[21]

Beyond 3 nm

The ITRS uses (as of 2017) the terms "2.1 nm", "1.5 nm", and "1.0 nm" as generic terms for the nodes after 3 nm.^[22]^[23] "2-nanometre" (2 nm) and "14 angstrom" (14 Å or 1.4 nm) nodes have also been (in 2017) tentatively identified by An Steegen (of IMEC) as future production nodes after 3 nm, with hypothesized introduction dates of around 2024, and beyond 2025 respectively.^[24]

In late 2018, TSMC chairman Mark Liu predicted chip scaling would continue to 3 nm and 2 nm nodes;^[25] however, as of 2019 other semiconductor specialists were undecided as to whether nodes beyond 3 nm could become viable.^[26] TSMC began research on 2nm in 2019.^[27]

In December 2019, Intel announced plans for 1.4 nm production in 2029.^[20]

References

^ Kobayashi, Toshio; Horiguchi, Seiji; Miyake, M.; Oda, M.; Kiuchi, K. (December 1985). "Extremely high transconductance (above 500 mS/mm) MOSFET with 2.5 nm gate oxide". 1985 International Electron Devices Meeting: 761–763. doi:10.1109/IEDM.1985.191088. S2CID 22309664.
^ Ahmed, Khaled Z.; Ibok, Effiong E.; Song, Miryeong; Yeap, Geoffrey; Xiang, Qi; Bang, David S.; Lin, Ming-Ren (1998). "Performance and reliability of sub-100 nm MOSFETs with ultra thin direct tunneling gate oxides". 1998 Symposium on VLSI Technology Digest of Technical Papers (Cat. No.98CH36216): 160–161. doi:10.1109/VLSIT.1998.689240. ISBN 0-7803-4770-6. S2CID 109823217.
^ Ahmed, Khaled Z.; Ibok, Effiong E.; Song, Miryeong; Yeap, Geoffrey; Xiang, Qi; Bang, David S.; Lin, Ming-Ren (1998). "Sub-100 nm nMOSFETs with direct tunneling thermal, nitrous and nitric oxides". 56th Annual Device Research Conference Digest (Cat. No.98TH8373): 10–11. doi:10.1109/DRC.1998.731099. ISBN 0-7803-4995-4. S2CID 1849364.
^ Schwierz, Frank; Wong, Hei; Liou, Juin J. (2010). Nanometer CMOS. Pan Stanford Publishing. p. 17. ISBN 9789814241083.
^ Wakabayashi, Hitoshi; Yamagami, Shigeharu; Ikezawa, Nobuyuki; Ogura, Atsushi; Narihiro, Mitsuru; Arai, K.; Ochiai, Y.; Takeuchi, K.; Yamamoto, T.; Mogami, T. (December 2003). "Sub-10-nm planar-bulk-CMOS devices using lateral junction control". IEEE International Electron Devices Meeting 2003: 20.7.1–20.7.3. doi:10.1109/IEDM.2003.1269446. ISBN 0-7803-7872-5. S2CID 2100267.
^ "Still Room at the Bottom (nanometer transistor developed by Yang-kyu Choi from the Korea Advanced Institute of Science and Technology )", Nanoparticle News, 1 April 2006, archived from the original on 6 November 2012
^ Lee, Hyunjin; Choi, Yang-Kyu; Yu, Lee-Eun; Ryu, Seong-Wan; Han, Jin-Woo; Jeon, K.; Jang, D.Y.; Kim, Kuk-Hwan; Lee, Ju-Hyun; et al. (June 2006), "Sub-5nm All-Around Gate FinFET for Ultimate Scaling", Symposium on VLSI Technology, 2006: 58–59, doi:10.1109/VLSIT.2006.1705215, hdl:10203/698, ISBN 978-1-4244-0005-8
^ Patterson, Alan (12 December 2016), "TSMC Plans New Fab for 3nm", www.eetimes.com
^ Patterson, Alan (2 October 2017), "TSMC Aims to Build World's First 3-nm Fab", www.eetimes.com
^ Zafar, Ramish (15 May 2019), TSMC To Commence 2nm Research In Hsinchu, Taiwan Claims Report
^ "TSMC to start production on 5nm in second half of 2020, 3nm in 2022". www.techspot.com.
^ Armasu 2019-12-06T20:26:59Z, Lucian. "Report: TSMC To Start 3nm Volume Production In 2022". Tom's Hardware.{{cite web}}: CS1 maint: numeric names: authors list (link)
^ "TSMC 3nm process fab starts construction - mass production in 2023". Gizchina.com. 25 October 2019.
^ Friedman, Alan. "TSMC starts constructing facilities to turn out 3nm chips by 2023". Phone Arena.
^ "Imec and Cadence Tape Out Industry's First 3nm Test Chip", www.cadence.com (press release), 28 February 2018
^ Armasu, Lucian (11 January 2019), "Samsung Plans Mass Production of 3nm GAAFET Chips in 2021", www.tomshardware.com
^ Samsung: 3nm process is one year ahead of TSMC in GAA and three years ahead of Intel, 6 August 2019
^ Armasu, Lucian (25 May 2017), "Samsung Reveals 4nm Process Generation, Full Foundry Roadmap", www.tomshardware.com
^ Cutress, Ian. "Samsung Announces 3nm GAA MBCFET PDK, Version 0.1". www.anandtech.com.
^ ^a ^b Cutress, Dr Ian. "Intel's Manufacturing Roadmap from 2019 to 2029: Back Porting, 7nm, 5nm, 3nm, 2nm, and 1.4 nm". www.anandtech.com.
^ Broekhuijsen 2020-01-03T16:28:57Z, Niels. "Samsung Prototypes First Ever 3nm GAAFET Semiconductor". Tom's Hardware. Retrieved 10 February 2020.{{cite web}}: CS1 maint: numeric names: authors list (link)
^ INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS 2017 EDITION - EXECUTIVE SUMMARY (PDF), ITRS, 2017, Table ES2, p.18
^ INTERNATIONAL ROADMAP FOR DEVICES AND SYSTEMS 2017 EDITION - MORE MOORE (PDF), ITRS, 2017, archived from the original (PDF) on 25 October 2018, retrieved 18 April 2019
^ Merritt, Rick (19 May 2017), "4 Views of the Silicon Roadmap - Distant hope for a 14-angstrom node", www.eetimes.com
^ Patterson, Alan (12 September 2018), "TSMC: Chip Scaling Could Accelerate", www.eetimes.com
^ Merritt, Rick (4 March 2019), "SPIE Conference Predicts Bumpy Chip Roadmap", www.eetasia.com
^ Zafar, Ramish (12 June 2019). "TSMC To Commence 2nm Research In Hsinchu, Taiwan Claims Report".

Semiconductor device fabrication

MOSFET scaling (process nodes)
020 μm – 1968 010 μm – 1971 006 μm – 1974 003 μm – 1977 1.5 μm – 1981 001 μm – 1984 800 nm – 1987 600 nm – 1990 350 nm – 1993 250 nm – 1996 180 nm – 1999 130 nm – 2001 090 nm – 2003 065 nm – 2005 045 nm – 2007 032 nm – 2009 028 nm – 2010 022 nm – 2012 014 nm – 2014 010 nm – 2016 007 nm – 2018 005 nm – 2020 003 nm – 2022
Future 002 nm ~ 2024
Half-nodes Density CMOS Device (multi-gate) Moore's law Transistor count Semiconductor Industry Nanoelectronics
v t e

History

Research and technology demos

Commercialization history

Beyond 3 nm

References

Further reading