A mask set or a photomask set is a series of electronic data that define geometry for the photolithography steps of semiconductor fabrication. Each of the physical masks generated from this data is called a photomask.
A mask set for a modern process typically contains as many as twenty or more masks, each of which defines a specific photolithographic step in the semiconductor fabrication process. Examples of masks include:
- metal1, 2, 3...
* Saint, Christopher and Judy. (2002). IC Layout Basics. McGraw-Hill. ISBN 0-07-138625-4