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Plasma ashing: Revision history

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For any version listed below, click on its date to view it. For more help, see Help:Page history and Help:Edit summary. (cur) = difference from current version, (prev) = difference from preceding version, m = minor edit, → = section edit, ← = automatic edit summary

curprev 10:2210:22, 25 April 2023‎ 2001:67c:10ec:5749:8000::1394 talk‎ 3,417 bytes +146‎ No edit summary undo

curprev 22:3422:34, 17 July 2022‎ Fadesga talk contribs‎ 3,271 bytes +11‎ →‎References undo

curprev 21:3021:30, 26 April 2022‎ Alexander Davronov talk contribs‎ 3,260 bytes +37‎ No edit summary undo Tag: Visual edit
curprev 21:2921:29, 26 April 2022‎ Alexander Davronov talk contribs‎ 3,223 bytes +13‎ ce undo Tag: Visual edit

curprev 12:3712:37, 20 April 2022‎ 195.65.218.114 talk‎ 3,210 bytes −1‎ grammer correction undo Tag: Visual edit

curprev 22:1422:14, 14 April 2022‎ 149.32.192.40 talk‎ 3,211 bytes +613‎ Adding my experience in developing this type of equipment undo

curprev 15:4615:46, 4 December 2021‎ Dough34 talk contribs‎ m 2,598 bytes −11‎ improve wording, remove space, remove bolding undo Tag: Visual edit

curprev 10:3210:32, 5 February 2021‎ CommanderInDubio talk contribs‎ 2,609 bytes +257‎ Adding/improving reference(s) undo Tag: Visual edit

curprev 23:1923:19, 12 May 2016‎ Timtempleton talk contribs‎ 2,352 bytes +47‎ Moved clarification of monatomic up to the first instance of the term being used, clarified photoresist and reactive species undo

curprev 18:3118:31, 16 April 2016‎ Dexbot talk contribs‎ m 2,305 bytes −21‎ Bot: Cleaning up old interwiki links undo

curprev 19:0519:05, 11 July 2012‎ Saehry talk contribs‎ m 2,326 bytes −7‎ No edit summary undo

curprev 17:5017:50, 28 April 2012‎ Speedevil talk contribs‎ 2,333 bytes +56‎ The process does not use ionising radiation - it uses RF and microwave to exceed the vastly lower breakdown potential in low pressure gas. This does not make the radiation used ionising in the normal definition. undo

curprev 21:3621:36, 1 February 2012‎ 152.14.242.177 talk‎ 2,277 bytes −77‎ No edit summary undo Tag: references removed
curprev 21:3521:35, 1 February 2012‎ 152.14.242.177 talk‎ 2,354 bytes +73‎ No edit summary undo

curprev 02:2302:23, 27 July 2011‎ 24.177.122.82 talk‎ 2,281 bytes −280‎ ~~~~ undo

curprev 02:2702:27, 11 February 2011‎ 74.76.180.19 talk‎ 2,561 bytes +280‎ Add more details on the new process using ULK undo

curprev 10:4310:43, 13 October 2010‎ 193.1.104.8 talk‎ 2,281 bytes +3‎ No edit summary undo
curprev 10:4210:42, 13 October 2010‎ 193.1.104.8 talk‎ 2,278 bytes −3‎ No edit summary undo

curprev 12:3212:32, 1 March 2010‎ Fram talk contribs‎ 2,281 bytes −14‎ Replace "unreferenced stub" with "unreferenced" using AWB undo

curprev 23:1223:12, 17 December 2009‎ SmackBot talk contribs‎ m 2,295 bytes +32‎ remove Erik9bot category,outdated, tag and general fixes undo

curprev 13:2513:25, 14 December 2009‎ SchuminWeb talk contribs‎ 2,263 bytes −4‎ Removing backlinks to Downstream plasma that has been speedily deleted per (CSD G2); using TW undo

curprev 21:2321:23, 24 November 2009‎ 74.9.159.47 talk‎ 2,267 bytes +1‎ No edit summary undo

curprev 06:1006:10, 21 November 2009‎ 202.141.154.213 talk‎ 2,266 bytes −1‎ No edit summary undo

curprev 05:1205:12, 20 October 2009‎ Mild Bill Hiccup talk contribs‎ m 2,267 bytes −13‎ copyedit undo

curprev 03:3103:31, 18 July 2009‎ Ks0stm talk contribs‎ m 2,280 bytes −226‎ Reverted 1 edit by 72.37.171.68 identified as vandalism to last revision by Erik9bot. (TW) undo
curprev 03:3103:31, 18 July 2009‎ 72.37.171.68 talk‎ 2,506 bytes +226‎ No edit summary undo

curprev 03:1803:18, 4 July 2009‎ Erik9bot talk contribs‎ 2,280 bytes +49‎ add Category:Articles lacking sources (Erik9bot) undo

curprev 04:1604:16, 8 November 2008‎ 209.147.108.89 talk‎ 2,231 bytes +1‎ corrected "specie" to "species" undo

curprev 19:0219:02, 25 July 2008‎ 192.94.94.106 talk‎ 2,230 bytes 0‎ Wording correction undo

curprev 06:4106:41, 15 February 2008‎ Xapht talk contribs‎ 2,230 bytes +452‎ No edit summary undo
curprev 06:3306:33, 15 February 2008‎ 76.174.250.29 talk‎ 1,778 bytes +4‎ No edit summary undo

curprev 13:4013:40, 18 November 2007‎ Abdull talk contribs‎ 1,774 bytes +4‎ No edit summary undo

curprev 02:3002:30, 8 October 2007‎ ChemGardener talk contribs‎ 1,770 bytes −133‎ remove spam section undo

curprev 00:5500:55, 7 October 2007‎ 71.135.33.107 talk‎ 1,903 bytes +53‎ Suppliers of Ashing Equipment undo

curprev 11:5311:53, 15 August 2007‎ 219.137.161.94 talk‎ 1,850 bytes +80‎ == Suppliers of Ashing Equipment == undo

curprev 02:1102:11, 8 February 2007‎ Smack talk contribs‎ m 1,770 bytes +22‎ Disambiguate Etch to Etching (microfabrication) using popups undo

curprev 19:5119:51, 24 June 2006‎ 82.152.157.198 talk‎ 1,748 bytes +1‎ No edit summary undo

curprev 02:4902:49, 2 March 2006‎ Pmetzger talk contribs‎ 1,747 bytes −4‎ remove hyperlink to "species" for now. undo
curprev 02:4802:48, 2 March 2006‎ Pmetzger talk contribs‎ m 1,751 bytes +3‎ species, not specie. undo

curprev 03:3103:31, 17 February 2006‎ Krash talk contribs‎ m 1,748 bytes +17‎ dab "Plasma" undo

curprev 13:4013:40, 5 May 2005‎ Art Carlson talk contribs‎ m 1,731 bytes +32‎ Category:Plasma processing undo

curprev 14:5414:54, 14 April 2005‎ Hooperbloob talk contribs‎ m 1,699 bytes +46‎ +cat undo

curprev 02:4002:40, 30 December 2004‎ Icairns talk contribs‎ 1,653 bytes +1‎ sci-stub->chem-stub undo

curprev 00:2300:23, 20 October 2004‎ Stevegiacomelli talk contribs‎ m 1,652 bytes +4‎ No edit summary undo

curprev 03:1203:12, 21 July 2004‎ Alsocal talk contribs‎ 1,648 bytes +4‎ stub tag undo

curprev 01:3601:36, 3 April 2004‎ 82.135.7.53 talk‎ 1,644 bytes +23‎ No edit summary undo

curprev 12:4012:40, 26 March 2004‎ Arnowaschk talk contribs‎ 1,621 bytes +4‎ No edit summary undo

curprev 03:1403:14, 10 June 2002‎ 80.218.20.112 talk‎ 1,617 bytes +2‎ bold title undo

curprev 15:5115:51, 25 February 2002‎ Conversion script talk contribs‎ m 1,615 bytes −5‎ Automated conversion undo

curprev 16:5916:59, 10 August 2001‎ Slick514 talk contribs‎ m 1,620 bytes +1,607‎ No edit summary undo

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