Resolution enhancement technologies: Revision history

21 July 2024

• curprev 23:4623:46, 21 July 2024 Onel5969 talk contribs m 8,918 bytes +42 Disambiguating links to Rayleigh criterion (link changed to Angular resolution#The_Rayleigh_criterion) using DisamAssist. undo

16 May 2023

• curprev 20:5720:57, 16 May 2023 Arjayay talk contribs m 8,876 bytes −4 Duplicate word removed undo

15 May 2023

• curprev 22:5822:58, 15 May 2023 Goodphy talk contribs 8,880 bytes +160 →Background: Fixed a link of "projection aligner". undo Tag: Visual edit

14 May 2023

• curprev 04:5804:58, 14 May 2023 Goodphy talk contribs 8,720 bytes +133 →Background: Added the need of an imaging system in the Chapter "Background". undo Tag: Visual edit

5 October 2022

• curprev 22:2322:23, 5 October 2022 Lokys dar Vienas talk contribs 8,587 bytes −3 →See also undo

27 March 2022

• curprev 01:0201:02, 27 March 2022 TKOIII talk contribs m 8,590 bytes +1 typo undo Tag: Visual edit

9 February 2022

• curprev 18:0918:09, 9 February 2022 Qwerfjkl (bot) talk contribs m 8,589 bytes 0 Capitalising short description "part of photolithography of integrated circuits" per WP:SDFORMAT (via Bandersnatch) undo

18 January 2022

• curprev 01:2901:29, 18 January 2022 Rlink2 talk contribs m 8,589 bytes +92 →Using resolution enhancement: Filling completely bare references Wikipedia:Bare_URLs undo Tag: AWB

28 September 2021

• curprev 21:0121:01, 28 September 2021 MarkMLl talk contribs m 8,497 bytes −2 →Background: s/Excitimer laser/Excimer laser/ undo
• curprev 20:5520:55, 28 September 2021 MarkMLl talk contribs m 8,499 bytes 0 →Background: s/is/in/ undo

4 June 2021

• curprev 16:2116:21, 4 June 2021 JanTH talk contribs m 8,499 bytes 0 →Basic concept: who's → whose undo

14 December 2020

• curprev 19:0719:07, 14 December 2020 GünniX talk contribs m 8,499 bytes +4 Reference before punctuation undo Tag: AWB

10 December 2020

• curprev 16:2716:27, 10 December 2020 129.16.141.225 talk 8,495 bytes +89 updated imaging wavelength to EUV undo

22 July 2020

• curprev 14:5414:54, 22 July 2020 Maury Markowitz talk contribs m 8,406 bytes −1 No edit summary undo
• curprev 14:5414:54, 22 July 2020 Maury Markowitz talk contribs 8,407 bytes +2,810 →Background: wow, this article managed to talk about everything except what they actually do undo
• curprev 14:2414:24, 22 July 2020 Maury Markowitz talk contribs m 5,597 bytes −39 No edit summary undo
• curprev 14:2214:22, 22 July 2020 Maury Markowitz talk contribs 5,636 bytes +1,033 add hatnote, some lede work, new section undo
• curprev 14:0714:07, 22 July 2020 Maury Markowitz talk contribs 4,603 bytes +336 No edit summary undo
• curprev 13:5813:58, 22 July 2020 Maury Markowitz talk contribs 4,267 bytes −9 No edit summary undo
• curprev 13:5413:54, 22 July 2020 Maury Markowitz talk contribs m 4,276 bytes −24 No edit summary undo
• curprev 13:5413:54, 22 July 2020 Maury Markowitz talk contribs 4,300 bytes +117 hatnote undo

27 May 2019

• curprev 22:3922:39, 27 May 2019 2601:541:4500:1760:898a:bdb4:aedc:fc9b talk 4,183 bytes −2 fix link undo

3 April 2019

• curprev 06:3706:37, 3 April 2019 Daviddwd talk contribs 4,185 bytes +113 short desc undo Tag: Visual edit

27 April 2018

• curprev 18:4018:40, 27 April 2018 Ewen talk contribs 4,072 bytes −10 "having an impact on" --> "affecting" undo

4 July 2017

• curprev 20:0520:05, 4 July 2017 PrimeBOT talk contribs m 4,082 bytes +4 Replace magic links with templates per local RfC - BRFA undo

22 July 2011

• curprev 17:1517:15, 22 July 2011 Qniemiec talk contribs 4,078 bytes +56 Added reference to similar article/title undo

10 November 2008

• curprev 14:2314:23, 10 November 2008 149.117.23.28 talk 4,022 bytes +102 Adding Attenuated Embedded Phse Shift Masks undo

1 November 2008

• curprev 15:5915:59, 1 November 2008 LilHelpa talk contribs m 3,920 bytes +2 spelling: agressive -> aggressive; fmt undo

26 October 2008

• curprev 16:2416:24, 26 October 2008 88.167.71.127 talk 3,918 bytes +10 No edit summary undo
• curprev 16:2316:23, 26 October 2008 88.167.71.127 talk 3,908 bytes +1,373 Bringing up to date and adding more typical description of RET as manufacturability improvement rather than just distortion compensation. undo

3 December 2006

• curprev 04:0904:09, 3 December 2006 24.161.125.148 talk 2,535 bytes +7 No edit summary undo

28 August 2006

• curprev 19:1219:12, 28 August 2006 SmackBot talk contribs m 2,528 bytes −3 ISBN formatting &/or general fixes using AWB undo

16 January 2006

• curprev 02:2302:23, 16 January 2006 Hooperbloob talk contribs 2,531 bytes −33 rm cat, no direct relationship undo

1 January 2006

• curprev 08:4708:47, 1 January 2006 LouScheffer talk contribs m 2,564 bytes −20 Reference may not always be paper undo

22 December 2005

• curprev 05:5205:52, 22 December 2005 LouScheffer talk contribs 2,584 bytes +130 wiki links and wording undo

21 December 2005

• curprev 03:2803:28, 21 December 2005 LouScheffer talk contribs 2,454 bytes +79 Added next step undo
• curprev 03:2703:27, 21 December 2005 LouScheffer talk contribs m 2,375 bytes +63 wording & categories undo
• curprev 03:2403:24, 21 December 2005 LouScheffer talk contribs 2,312 bytes +2 techniques to technologies. Both are used. undo
• curprev 03:2303:23, 21 December 2005 LouScheffer talk contribs m 2,310 bytes 0 moved Resolution enhancement techniques to Resolution enhancement technologies undo
• curprev 03:1303:13, 21 December 2005 LouScheffer talk contribs 2,310 bytes +2,310 Initial version